SUBSTRATE LASER OXIDE REMOVAL PROCESS FOLLOWED BY ELECTRO OR IMMERSION PLATING
First Claim
1. A method of ablating the surface of a substrate comprising:
- (a) providing a dry substrate and an electrolyte;
(b) ablating the surface of the dry substrate to at least partially remove a native oxide layer thereon; and
(c) immersing the ablated dry substrate in the electrolyte, wherein the dry substrate is ablated prior to being introduced into the electrolyte.
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Accused Products
Abstract
Method of ablating the surface of a substrate including providing a dry substrate and an electrolyte source, ablating the surface of the dry substrate to at least partially remove a native oxide layer, and immersing the ablated dry substrate in the electrolyte source, in which the dry substrate is ablated prior to being introduced into the electrolyte source. Also provided is a method of ablating the surface of a substrate that includes providing a dry substrate and an electrolyte, depositing a portion of the electrolyte on the substrate at a thickness of less than 10 microns and ablating the surface of the substrate with the electrolyte applied thereon. System for use in the ablation of the surface of a substrate are also provided.
67 Citations
21 Claims
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1. A method of ablating the surface of a substrate comprising:
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(a) providing a dry substrate and an electrolyte; (b) ablating the surface of the dry substrate to at least partially remove a native oxide layer thereon; and (c) immersing the ablated dry substrate in the electrolyte, wherein the dry substrate is ablated prior to being introduced into the electrolyte. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for use in the ablation of the surface of a substrate using an electrolyte source, comprising:
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(a) a laser to provide a laser beam; (b) a substrate; and (d) a conveyor to direct the substrate towards the electrolyte source; wherein the laser and substrate are configured such that the laser beam contacts the substrate in a dry form prior to being introduced to the electrolyte source. - View Dependent Claims (10, 11, 12, 13)
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14. A method of ablating the surface of a substrate comprising:
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(a) providing a dry substrate and an electrolyte; (b) depositing a portion of the electrolyte on the substrate at a thickness of less than 10 microns; (c) ablating the surface of the substrate with the electrolyte applied thereon. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A system for use in the ablation of the surface of a substrate comprising:
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(a) a laser to provide a laser beam; (b) a substrate; (c) a wetting pad that includes an electrolyte; and (d) a support block configured to direct the substrate towards the wetting pad; wherein the laser and substrate are configured such that the laser beam contacts the substrate prior to being introduced to the wetting pad. - View Dependent Claims (21)
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Specification