METHOD FOR PRODUCING AN OPTOELECTRONIC COMPONENT AND OPTOELECTRONIC COMPONENT
First Claim
1. A method for producing an optoelectronic component, comprising:
- providing a silicon-based growth substrate, which has a first coefficient of thermal expansion;
applying a multilayered nitride-containing buffer layer sequence;
epitaxially depositing a layer sequence, which has a second coefficient of thermal expansion, different than the first coefficient of thermal expansion, and further comprises an active layer suitable for emitting electromagnetic radiation;
forming contacts in the epitaxially deposited layer sequence;
applying a carrier substrate on the epitaxially deposited layer sequence provided with contacts;
removing the growth substrate;
structuring the multilayered buffer layer sequence in order to increase a coupling-out of electromagnetic radiation;
making contact with the epitaxially deposited layer sequence.
2 Assignments
0 Petitions
Accused Products
Abstract
In a method for producing an optoelectronic component, a growth substrate having a first coefficient of thermal expansion is provided. A multilayered buffer layer sequence is applied thereto. A layer sequence having a second coefficient of thermal expansion—different than the first coefficient of thermal expansion—is subsequently deposited epitaxially. It furthermore comprises an active layer for emitting electromagnetic radiation. A carrier substrate is subsequently applied on the epitaxially deposited layer sequence. The growth substrate is removed and the multilayered buffer layer sequence is structured in order to increase a coupling-out of electromagnetic radiation. Finally, contact is made with the epitaxially deposited layer sequence.
24 Citations
13 Claims
-
1. A method for producing an optoelectronic component, comprising:
-
providing a silicon-based growth substrate, which has a first coefficient of thermal expansion; applying a multilayered nitride-containing buffer layer sequence; epitaxially depositing a layer sequence, which has a second coefficient of thermal expansion, different than the first coefficient of thermal expansion, and further comprises an active layer suitable for emitting electromagnetic radiation; forming contacts in the epitaxially deposited layer sequence; applying a carrier substrate on the epitaxially deposited layer sequence provided with contacts; removing the growth substrate; structuring the multilayered buffer layer sequence in order to increase a coupling-out of electromagnetic radiation; making contact with the epitaxially deposited layer sequence. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
Specification