STRUCTURED SILICON ANODE
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Accused Products
Abstract
A battery can be fabricated from a substrate including silicon. This allows the battery to be produced as an integrated unit. The battery includes a anode formed from an array of spaced elongated structures, such as pillars, which include silicon and which can be fabricated on the substrate. The battery also includes a cathode which can include lithium.
99 Citations
41 Claims
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1-8. -8. (canceled)
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9. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising an array of spaced elongated structures extending from a substrate, wherein the elongated structures comprise silicon; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising; providing a substrate comprising silicon, removing material from the substrate to form a plurality of spaced pillars on the substrate; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising a plurality of spaced elongated structures each mounted at one end to a substrate and extending away therefrom, wherein the elongated structures comprise silicon; forming a cathode; and arranging the anode and cathode in communication to form a battery. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification