SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A semiconductor device comprising:
- a pixel portion including a first transistor over a substrate;
a driver circuit portion including a second transistor over the substrate,wherein the first transistor comprises;
a first gate electrode layer over the substrate;
a first insulating layer over the first gate electrode layer;
a first oxide semiconductor layer over the first insulating layer, the first oxide semiconductor layer including a first crystalline region in a superficial portion of the first oxide semiconductor layer;
a first source electrode layer overlapping with part of the first oxide semiconductor layer;
a first drain electrode layer overlapping with part of the first oxide semiconductor layer; and
a second insulating layer over the first source electrode layer and the first drain electrode layer and in contact with part of the first oxide semiconductor layer, andwherein the second transistor comprises;
a second oxide semiconductor layer over the first insulating layer, the second oxide semiconductor layer including a second crystalline region in a superficial portion of the second oxide semiconductor layer;
a second source electrode layer overlapping with part of the second oxide semiconductor layer;
a second drain electrode layer overlapping with part of the second oxide semiconductor layer;
the second insulating layer over the second source electrode layer and the second drain electrode layer and in contact with part of the second oxide semiconductor layer; and
a second gate electrode layer over the second oxide semiconductor layer with the second insulating layer interposed therebetween.
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Accused Products
Abstract
An object of an embodiment of the present invention is to manufacture a semiconductor device with high display quality and high reliability, which includes a pixel portion and a driver circuit portion capable of high-speed operation over one substrate, using transistors having favorable electric characteristics and high reliability as switching elements. Two kinds of transistors, in each of which an oxide semiconductor layer including a crystalline region on one surface side is used as an active layer, are formed in a driver circuit portion and a pixel portion. Electric characteristics of the transistors can be selected by choosing the position of the gate electrode layer which determines the position of the channel. Thus, a semiconductor device including a driver circuit portion capable of high-speed operation and a pixel portion over one substrate can be manufactured.
205 Citations
15 Claims
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1. A semiconductor device comprising:
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a pixel portion including a first transistor over a substrate; a driver circuit portion including a second transistor over the substrate, wherein the first transistor comprises; a first gate electrode layer over the substrate; a first insulating layer over the first gate electrode layer; a first oxide semiconductor layer over the first insulating layer, the first oxide semiconductor layer including a first crystalline region in a superficial portion of the first oxide semiconductor layer; a first source electrode layer overlapping with part of the first oxide semiconductor layer; a first drain electrode layer overlapping with part of the first oxide semiconductor layer; and a second insulating layer over the first source electrode layer and the first drain electrode layer and in contact with part of the first oxide semiconductor layer, and wherein the second transistor comprises; a second oxide semiconductor layer over the first insulating layer, the second oxide semiconductor layer including a second crystalline region in a superficial portion of the second oxide semiconductor layer; a second source electrode layer overlapping with part of the second oxide semiconductor layer; a second drain electrode layer overlapping with part of the second oxide semiconductor layer; the second insulating layer over the second source electrode layer and the second drain electrode layer and in contact with part of the second oxide semiconductor layer; and a second gate electrode layer over the second oxide semiconductor layer with the second insulating layer interposed therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A manufacturing method of a semiconductor device comprising the steps of:
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forming a first gate electrode layer over a substrate; forming a first insulating layer over the first gate electrode layer; forming a first oxide semiconductor layer and a second oxide semiconductor layer over the first insulating layer, wherein the first oxide semiconductor layer is formed so as to overlap with the first gate electrode layer with the first insulating layer interposed therebetween; performing a first heat treatment on the first oxide semiconductor layer and the second oxide semiconductor layer, so that a first crystalline region is formed in a superficial portion of the first oxide semiconductor layer and a second crystalline region is formed in a superficial portion of the second oxide semiconductor layer; forming a first source electrode layer and a first drain electrode layer over the first oxide semiconductor layer, and a second source electrode layer and a second drain electrode layer over the second oxide semiconductor layer; forming a second insulating layer over the first source electrode layer, the first drain electrode layer, the second source electrode layer, and the second drain electrode layer so as to be in contact with part of the first oxide semiconductor layer and part of the second oxide semiconductor layer and so as to cover the first source electrode layer, the second source electrode layer, the first drain electrode layer, and the second drain electrode layer; and forming a second gate electrode layer over the second insulating layer so as to overlap with the second oxide semiconductor layer. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification