WORK PROCESS CONTROL DEVICE, WORK PROCESS CONTROL METHOD, AND PROGRAM

• US 20110112676A1
• Filed: 10/28/2010
• Published: 05/12/2011
• Est. Priority Date: 11/06/2009
• Status: Abandoned Application

• Current Assignee: Elpida Memory Incorporated (Micron Technology, Inc.)
• Original Assignee: Elpida Memory Incorporated (Micron Technology, Inc.)
• Inventors: IZUMI, Hiroaki
• Application Number:
  US12/914,157
• Publication Number:
  US 20110112676A1
• Time in Patent Office: Days
• US Class Current: 700/101
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/32258 Resource, machine assignment preferences, actual and anticipated load
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

An apparatus for controlling work process includes a lot allocation unit that gives a highest priority for lot-allocation to a device available for process. The device, which is given the highest priority, has at least one of a minimum number of lots-in-process and a maximum number of unworkable processes among devices available for process.

Claims

1. An apparatus for controlling work process, the apparatus comprising:

a priority calculation unit that calculates a respective priority for each of devices available for process and for each of lots-in-process, with reference to at least first, second, third and fourth sets of information,

the first set of information comprising a respective number of lots-in-process for each of devices available for processing the lots-in-process,

the second set of information comprising a respective number of devices available for processing each of the lots-in-process,

the third set of information comprising a respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process, and

the fourth set of information comprising a respective maximum possible working rate for each of the devices available for processing the lots-in-process; and

an allocation decision unit that decides a respective one of the devices, to which each of the lots-in-process is to be allocated, with reference to the respective priorities.

2. The apparatus according to claim 1, wherein the priority calculation unit calculates the respective priorities based on the respective numbers of lots-in-process, the respective numbers of devices available, the respective standard work times, and the respective maximum possible working rates.

3. The apparatus according to claim 2, wherein the priority calculation unit calculates each of the priorities by multiplying:

the reciprocal of the respective number of lots-in-process for each of devices available for processing the lots-in-process;

the reciprocal of the respective number of devices available for processing each of the lots-in-process;

the reciprocal of the respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process; and

the respective maximum possible working rate for each of the devices available for processing the lots-in-process.

4. The apparatus according to claim 1, wherein the allocation decision unit selects a respective one of the devices for each of the lots-in-process so that the respective one has a maximum priority in the each lot-in-process.

5. The apparatus according to claim 1, wherein the allocation decision unit extracts respective combinations of the lots-in-process and the respective ones of the devices, to which the lots-in-process are to be allocated respectively, and the allocation decision unit selects one-by-one the respective combinations in the order of priority.

6. The apparatus according to claim 1, further comprising:

a priority calculation information acquisition unit that calculates;

the respective number of lots-in-process for each of devices available for processing the lots-in-process,

the respective number of devices available for processing each of the lots-in-process,

the respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process, and

the respective maximum possible working rate for each of the devices available for processing the lots-in-process.

7. The apparatus according to claim 6, further comprising:

a priority temporary-allocation unit that executes temporary allocation for priority-processing of a lot-in-process according to a rule, the lot-in-process being a lot that is being in a waiting state,

wherein the priority calculation information acquisition unit receives a result of execution of the temporary allocation from the priority temporary-allocation unit.

8. The apparatus according to claim 7, further comprising:

an empty device determination unit that receives the result of execution of the temporary allocation from the priority temporary-allocation unit,

the empty device determination unit managing operating states of the devices,

the empty device determination unit determining, whether each of the devices is in working state or in empty state, based on an operating state of each of the devices and on the result of execution of the temporary allocation,

the empty device determination unit notifying, to the priority temporary-allocation unit, a result of determination of whether each of the devices is in working state or in empty state.

9. An apparatus for controlling work process, the apparatus comprising:

a lot allocation unit that gives a highest priority for lot-allocation to a device available for process, the device given the highest priority having at least one of a minimum number of lots-in-process and a maximum number of unworkable processes among devices available for process.

10. The apparatus according to claim 9, wherein the lot allocation unit comprises:

a priority calculation unit that calculates a respective priority for each of devices available for process and for each of lots-in-process, with reference to at least first, second, third and fourth sets of information,

the first set of information comprising a respective number of lots-in-process for each of devices available for processing the lots-in-process,

the second set of information comprising a respective number of devices available for processing each of the lots-in-process,

the third set of information comprising a respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process, and

the fourth set of information comprising a respective maximum possible working rate for each of the devices available for processing the lots-in-process.

11. The apparatus according to claim 10, wherein the priority calculation unit calculates the respective priorities based on the respective numbers of lots-in-process, the respective numbers of devices available, the respective standard work times, and the respective maximum possible working rates.

12. The apparatus according to claim 11, wherein the priority calculation unit calculates each of the priorities by multiplying:

the reciprocal of the respective number of lots-in-process for each of devices available for processing the lots-in-process;

the reciprocal of the respective number of devices available for processing each of the lots-in-process;

the reciprocal of the respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process; and

the respective maximum possible working rate for each of the devices available for processing the lots-in-process.

13. The apparatus according to claim 10, wherein the lot allocation unit further comprises:

an allocation decision unit that decides a respective one of the devices, to which each of the lots-in-process is to be allocated, with reference to the respective priorities.

14. The apparatus according to claim 13, wherein the allocation decision unit selects a respective one of the devices for each of the lots-in-process so that the respective one has a maximum priority in the each lot-in-process.

15. The apparatus according to claim 13, wherein the allocation decision unit extracts respective combinations of the lots-in-process and the respective ones of the devices, to which the lots-in-process are to be allocated respectively, and the allocation decision unit selects one-by-one the respective combinations in the order of priority

16. The apparatus according to claim 10, further comprising:

a priority calculation information acquisition unit that calculates;

the respective number of lots-in-process for each of devices available for processing the lots-in-process,

the respective number of devices available for processing each of the lots-in-process,

the respective standard work time for each of the devices available for processing the lots-in-process and for each of the lots-in-process, and

the respective maximum possible working rate for each of the devices available for processing the lots-in-process.

17. The apparatus according to claim 16, further comprising:

a priority temporary-allocation unit that executes temporary allocation for priority-processing of a lot-in-process according to a rule, the lot-in-process being a lot that is being in a waiting state,

wherein the priority calculation information acquisition unit receives a result of execution of the temporary allocation from the priority temporary-allocation unit.

18. The apparatus according to claim 17, further comprising:

an empty device determination unit that receives the result of execution of the temporary allocation from the priority temporary-allocation unit,

the empty device determination unit managing operating states of the devices,

the empty device determination unit determining, whether each of the devices is in working state or in empty state, based on an operating state of each of the devices and on the result of execution of the temporary allocation,

the empty device determination unit notifying, to the priority temporary-allocation unit, a result of determination of whether each of the devices is in working state or in empty state.

19. An apparatus for controlling work process, the apparatus comprising:

a lot allocation unit that determines a respective device, to which each of selected lots is to be allocated, the selected lots being lots on which actual working is currently required, the lot allocation unit determining the respective device with reference to at least a number of devices available for processing the selected lots and a number of the selected lots.

20. The apparatus according to claim 19, wherein the lot allocation unit determines the respective device by multiplying:

the reciprocal of a respective number of lots in the selected lots for each of devices available for processing the selected lots;

the reciprocal of a respective number of devices available for processing each of the selected lots;

the reciprocal of a respective standard work time for each of the devices available for processing the selected lots and for each of the selected lots; and

a respective maximum possible working rate for each of the devices available for processing the selected lots.