Substrate processing system and data retrieval method

• US 20110113033A1
• Filed: 01/10/2011
• Published: 05/12/2011
• Est. Priority Date: 04/09/2007
• Status: Active Grant

• Current Assignee: Kokusai Electric Corp.
• Original Assignee: Hitachi Kokusai Electric Incorporated (Hitachi, Ltd.)
• Inventors: Koshimaki, Toshiro
• Granted Patent: US 8,312,333 B2
• Time in Patent Office: Days
• US Class Current: 707/737
• CPC Class Codes: G06F 16/2454 Optimisation of common expressions
• CPC Class Codes: G06F 16/248 Presentation of query results

Abstract

An operation terminal, which includes an operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.

Claims

1. An operation terminal, wherein the operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.

2. A group administration apparatus, wherein the group administration apparatus, at a time of data acquisition request from one of a plurality of operation terminals, on the basis of data acquisition request formats acquired from the plurality of operation terminals, expands the data acquisition request formats for a plurality of substrate processing apparatuses for each of the plurality of operation terminals, merges display items to be retrieved with the same retrieval condition which is included in retrieval conditions set forth in the expanded data acquisition request formats, and generates merge tables respectively corresponding to the plurality of substrate processing apparatuses.

3. The group administration apparatus according to claim 2, further comprising a data accumulation area for accumulating data of the plurality of substrate processing apparatuses, wherein

the group administration apparatus searches the data accumulation area using the generated merge tables.

4. The group administration apparatus according to claim 2, wherein the group administration apparatus generates individual merge tables for the substrate processing apparatuses and merges the information of the merge tables and the data acquisition request formats which comprise display item information of the operation terminals so as to generate a merge data administration table.

5. The group administration apparatus according to claim 4, further comprising a data retrieval result storing table for storing retrieval result, wherein

the group administration apparatus compares the contents of the data retrieval result storing table and the merge data administration table with each other so as to generate an operation terminal retrieval result storing table used for transmitting data to the corresponding operation terminal.

6. The group administration apparatus according to claim 5, wherein the group administration apparatus periodically searches a data accumulation area for accumulating data of the plurality of substrate processing apparatuses so as to generate the operation terminal retrieval result storing table.

7. A substrate processing system comprising:

a plurality of operation terminals each for generating a data acquisition request format for each of a plurality of substrate processing apparatuses for processing substrates; and

group administration apparatus for, on the basis of data acquisition request formats acquired from the plurality of operation terminals, expanding the data acquisition request formats for a plurality of substrate processing apparatuses for each of the plurality of operation terminals, and merging display items to be retrieved with the same retrieval condition which is included in retrieval conditions set forth in the expanded data acquisition request formats, so as to generate merge tables respectively corresponding to the plurality of substrate processing apparatuses.

8. A data processing method for a substrate processing apparatus, the method comprising:

at a time of data acquisition request from an operation terminal, merging display items to be retrieved with the same retrieval condition which is included in retrieval conditions set forth in a data acquisition request format acquired from the operation terminal.

9. The data processing method according to claim 8, further comprising:

generating individual merge tables for the substrate processing apparatuses; and

merging the information of the merge tables and display item information of the operation terminal.

10. The data processing method according to claim 9, further comprising:

storing a result of retrieval of the data of retrieval target performed by using the merge table into a first retrieval result storing table; and

comparing the first retrieval result storing table with a merge data administration table generated by merging the data acquisition request format and the merge table so as to generate a second retrieval result storing table used for transmitting the data, and then transmitting the contents of the second retrieval result storing table to the corresponding operation terminal.

11. A data processing method for a substrate processing apparatus, the method comprising:

transmitting a data acquisition request format in which a retrieval condition and a data type are formatted for each display item to be displayed on an operation terminal of a displaying target; and

merging data types in each display item to be retrieved with the same retrieval condition which is included in retrieval conditions set forth in the data acquisition request format.

12. The data processing method according to claim 11, further comprising:

generating individual merge tables for the substrate processing apparatuses; and

merging the information of the merge tables and display item information of the operation terminal.

13. The data processing method according to claim 12, further comprising:

storing a result of retrieval of the data of retrieval target performed by using the merge table into a first retrieval result storing table; and

comparing the first retrieval result storing table with a merge data administration table generated by merging the data acquisition request format and the merge table so as to generate a second retrieval result storing table used for transmitting the data, and then transmitting the contents of the second retrieval result storing table to the corresponding operation terminal.