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Substrate processing system and data retrieval method

  • US 20110113033A1
  • Filed: 01/10/2011
  • Published: 05/12/2011
  • Est. Priority Date: 04/09/2007
  • Status: Active Grant
First Claim
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1. An operation terminal, wherein the operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.

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