MICROMECHANICAL ACCELERATION SENSOR
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Accused Products
Abstract
A micromechanical acceleration sensor includes at least a first seismic mass which is suspended in a deflectable manner, at least one readout device for detecting the deflection of the first seismic mass and at least one resetting device.
44 Citations
24 Claims
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1-10. -10. (canceled)
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11. A micromechanical acceleration sensor comprising:
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at least a first seismic mass which is suspended in a deflectable manner, at least one readout device for detecting a deflection of the first seismic mass, and at least one resetting device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification