COMPONENT WITH ENHANCED SHELF LIFE

• US 20110114519A1
• Filed: 11/11/2010
• Published: 05/19/2011
• Est. Priority Date: 11/13/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: BHATNAGAR, ASHISH, NARENDRNATH, KADTHALA R.
• Granted Patent: US 8,225,927 B2
• Time in Patent Office: Days
• US Class Current: 206/349
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

A process has been developed that significantly reduces moisture absorption of components, resulting in a component which is less susceptible to moisture and adsorption/absorption effects to the components functionality. In one embodiment, a component having reduced susceptibility to moisture exposure includes a component disposed in an air-tight package, the component having a blocking gas disposed in pores on a surface of the component. In another embodiment, a method for preparing a component having reduced susceptibility to moisture exposure includes driving water from a component in a controlled environment, exposing the component in the controlled environment to a blocking gas, removing the component in the controlled environment, and optionally sealing the component in an air-tight package.

Claims

1. A chamber component having reduced susceptibility to moisture exposure, comprising:

a component having a blocking gas disposed in pores on a surface of the component; and

a sealed air-tight package having the component disposed therein.

2. The chamber component of claim 1, wherein the sealed air-tight package is vacuum sealed.

3. The chamber component of claim 1, wherein the sealed air-tight package is back-filled with a dry inert gas.

4. The chamber component of claim 3, wherein the dry inert gas is selected from the group consisting of Argon, Neon, and Nitrogen.

5. The chamber component of claim 3, wherein the dry inert gas has a mass and/or size greater than that of a water vapor molecule.

6. The chamber component of claim 1, wherein the component is fabricated from or coated with a hygroscopic material.

7. The chamber component of claim 1, wherein the component is selected from the group consisting of a vacuum processing chamber component, a high vacuum system component, a component having a porous surface, a medical component, an orthopedic component, a component having thermal/plasma sprayed coatings, prosthetic component, and a rechargeable battery/fuel cell having high surface area.

8. The chamber component of claim 1, wherein the component is an electrostatic chuck.

9. A method for preparing a component having reduced susceptibility to moisture exposure, comprising:

driving water from a component in a controlled environment;

exposing the component in the controlled environment to a blocking gas;

removing the component from the controlled environment; and

optionally sealing the component in an air-tight package.

10. The method of claim 9, wherein sealing the component further comprises:

vacuum-bagging the component in the air-tight package.

11. The method of claim 9, sealing the component further comprises:

filling the air-tight package with the blocking gas.

12. The method of claim 9, wherein the blocking gas has a mass and/or size greater than that of a water vapor molecule.

13. The method of claim 9, wherein the component is selected from the group consisting of a vacuum processing chamber component, a high vacuum system component, a component having a porous surface, a medical component, an orthopedic component, a component having thermal/plasma sprayed coatings, prosthetic component, and a rechargeable battery/fuel cell having high surface area.

14. The method of claim 9, wherein the component is an electrostatic chuck.

15. A method for preserving the functionality of chamber components after a substrate has been removed from a processing chamber and before the processing chamber is vented, the method comprising;

discharging a blocking gas into the processing chamber at sub-ambient pressure such that the chamber components in the processing chamber having hygroscopic materials are blanketed with the blocking gas, the blocking gas entering pores of the hygroscopic materials;

venting the processing chamber; and

opening the processing chamber to expose the chamber components to ambient atmosphere while the blocking gas remains in the pores of the hygroscopic material.