COMPONENT WITH ENHANCED SHELF LIFE
First Claim
1. A chamber component having reduced susceptibility to moisture exposure, comprising:
- a component having a blocking gas disposed in pores on a surface of the component; and
a sealed air-tight package having the component disposed therein.
1 Assignment
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Accused Products
Abstract
A process has been developed that significantly reduces moisture absorption of components, resulting in a component which is less susceptible to moisture and adsorption/absorption effects to the components functionality. In one embodiment, a component having reduced susceptibility to moisture exposure includes a component disposed in an air-tight package, the component having a blocking gas disposed in pores on a surface of the component. In another embodiment, a method for preparing a component having reduced susceptibility to moisture exposure includes driving water from a component in a controlled environment, exposing the component in the controlled environment to a blocking gas, removing the component in the controlled environment, and optionally sealing the component in an air-tight package.
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Citations
15 Claims
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1. A chamber component having reduced susceptibility to moisture exposure, comprising:
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a component having a blocking gas disposed in pores on a surface of the component; and a sealed air-tight package having the component disposed therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for preparing a component having reduced susceptibility to moisture exposure, comprising:
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driving water from a component in a controlled environment; exposing the component in the controlled environment to a blocking gas; removing the component from the controlled environment; and optionally sealing the component in an air-tight package. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A method for preserving the functionality of chamber components after a substrate has been removed from a processing chamber and before the processing chamber is vented, the method comprising;
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discharging a blocking gas into the processing chamber at sub-ambient pressure such that the chamber components in the processing chamber having hygroscopic materials are blanketed with the blocking gas, the blocking gas entering pores of the hygroscopic materials; venting the processing chamber; and opening the processing chamber to expose the chamber components to ambient atmosphere while the blocking gas remains in the pores of the hygroscopic material.
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Specification