×

COMPONENT WITH ENHANCED SHELF LIFE

  • US 20110114519A1
  • Filed: 11/11/2010
  • Published: 05/19/2011
  • Est. Priority Date: 11/13/2009
  • Status: Active Grant
First Claim
Patent Images

1. A chamber component having reduced susceptibility to moisture exposure, comprising:

  • a component having a blocking gas disposed in pores on a surface of the component; and

    a sealed air-tight package having the component disposed therein.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×