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BACKSIDE ILLUMINATED IMAGE SENSOR WITH REDUCED DARK CURRENT

  • US 20110115957A1
  • Filed: 01/25/2011
  • Published: 05/19/2011
  • Est. Priority Date: 07/09/2008
  • Status: Abandoned Application
First Claim
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1. An image sensor having a pixel array configured for backside illumination, comprising:

  • a sensor layer comprising a plurality of photosensitive elements of the pixel array; and

    an oxide layer adjacent a backside surface of the sensor layer;

    wherein the sensor layer comprises a seed layer and an epitaxial layer formed over the seed layer, the seed layer having a cross-sectional doping profile in which a designated dopant is substantially confined to a pixel array area of the sensor layer.

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