MICROMINIATURE X-RAY TUBE WITH TRIODE STRUCTURE USING A NANO EMITTER

• US 20110116603A1
• Filed: 11/13/2008
• Published: 05/19/2011
• Est. Priority Date: 12/17/2007
• Status: Active Grant

• Current Assignee: Electronics and Telecommunications Research Institute
• Original Assignee: Electronics and Telecommunications Research Institute
• Inventors: Song, Yoon Ho, Kim, Dae Jun, Jeong, Jin Woo
• Granted Patent: US 8,300,769 B2
• Time in Patent Office: Days
• US Class Current: 378/119
• CPC Class Codes: H01J 2235/062 Cold cathodes
• CPC Class Codes: H01J 2235/068 Multi-cathode assembly
• CPC Class Codes: H01J 2235/164 Small cross-section, e.g. for entering in a body cavity
• CPC Class Codes: H01J 35/065 Field emission, photo emission or secondary emission cathodes
• CPC Class Codes: H01J 35/116 Transmissive anodes acting as a window H01J35/186
• CPC Class Codes: H01J 35/147 Spot size control
• CPC Class Codes: H01J 35/16 Vessels; Containers; Shields associated therewith
• CPC Class Codes: H01J 35/186 used as targets or X-ray converters

Abstract

A microminiature X-ray tube with a triode structure using a nano emitter is provided, which can increase a field emission region as much as possible by means of nano emitters fine-patterned in a cathode to not only increase an emission current per unit area as much as possible but secure high electrical characteristics, reliability, and structural stability by means of a cover and a bonding material. In addition, gate holes having a macro structure can be formed in the gate to promote electron beam focusing by means of the gate without using a separate focusing electrode and to prevent a leakage current from occurring on the gate. Further, an auxiliary electrode can be formed on a top or an inner surface of a cover applied for structural stability to further promote the electron beam focusing and to control the output amounts per individual X-ray tubes output according to current switching to be equal to each other.

Claims

1. A microminiature X-ray tube with a triode structure using a nano emitter, comprising:

a cathode having fine-patterned nano emitters;

a gate disposed above the cathode to induce electron emission and focus electron beams;

an electron emitter including a cover disposed above the gate; and

an anode disposed above the electron emitter and accelerating electrons emitted from the cathode to generate an X-ray by means of electron collision,

wherein the electron emitter is fixed from the cathode to the cover by a bonding material.

2. The microminiature X-ray tube according to claim 1, wherein the nano emitters are fine-patterned on the cathode through screen printing, exposure, and development.

3. The microminiature X-ray tube according to claim 1, wherein the cover has a hole larger than a field emission region of the nano emitters.

4. The microminiature X-ray tube according to claim 1, wherein a plurality of gate holes each having the same pitch as the nano emitter are formed in a macro structure in the gate, and the size of the gate hole are greater than sizes of the nano emitters.

5. The microminiature X-ray tube according to claim 4, wherein the gate holes have a minimum pitch within the size of the gate.

6. The microminiature X-ray tube according to claim 4, wherein the gate holes are arranged in an arbitrary shape.

7. The microminiature X-ray tube according to claim 4, wherein the gate holes have inclined opening structures which are inclined at a predetermined angle to allow the electron beams emitted from the nano emitters to be focused onto the anode.

8. The microminiature X-ray tube according to claim 1, wherein the bonding material is a frit glass.

9. The microminiature X-ray tube according to claim 1, wherein the gate and the cover are formed of a metal material having a thermal expansion coefficient similar to the bonding material.

10. The microminiature X-ray tube according to claim 1, wherein a spacer is interposed between the cathode and the gate to maintain a predetermined interval between the cathode and the gate.

11. The microminiature X-ray tube according to claim 1, wherein an auxiliary electrode formed of a conductive metal is disposed on a top or an inner surface of the cover to allow the electron beams focused through the gate to have a finer focal point.

12. The microminiature X-ray tube according to claim 11, wherein a width of the auxiliary electrode disposed on the top of the cover is not greater than a top width of the cover, and a thickness of the auxiliary electrode disposed on the inner surface of the cover is not greater than one half of the thickness of the cover or has a value corresponding to a thickness enough to secure an insulating property as much as possible.

13. The microminiature X-ray tube according to claim 1, wherein the electron emitter further comprises a transistor for current switching, the cathode is coupled to a source of the transistor, a pulse voltage is applied to the gate of the transistor, and a ground is coupled to the drain of the transistor.

14. The microminiature X-ray tube according to claim 13, wherein an amount of electrons emitted from the nano emitters is controlled by the cathode current, wherein the cathode current is controlled by the pulse voltage applied to the gate of the transistor.

15. The microminiature X-ray tube according to claim 1, wherein the electron emitter is mounted within a vacuum tube.