MULTI-BIOMARKER BIOSENSOR
First Claim
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1. A nanosubstrate comprising:
- a substrate layer comprising a photoresist material;
a conductive layer deposited on the substrate layer; and
an insulating layer deposited on the conductive layer, the insulating layer interrupted by one or more nanotrenches or nanowells having a width of at least about 20 nm.
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Abstract
Nanosubstrates as biosensors, methods of making such nanosubstrates, and methods of using such nanosubstrates to detect biomarkers are described.
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Citations
28 Claims
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1. A nanosubstrate comprising:
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a substrate layer comprising a photoresist material; a conductive layer deposited on the substrate layer; and an insulating layer deposited on the conductive layer, the insulating layer interrupted by one or more nanotrenches or nanowells having a width of at least about 20 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 25, 26, 27, 28)
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15. A method of preparing a nanosubstrate, comprising:
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providing a first substrate layer; depositing an adhesion layer onto a surface of the first substrate layer; depositing a second substrate layer onto the adhesion layer; depositing a conductive layer onto the second substrate layer; depositing an insulating layer onto the conducting layer; creating a pattern of nanotrenches or nanowells in the insulating layer by lithography; and removing the adhesion layer to release the nanosubstrate, the nanosubstrate comprising the second substrate layer, the conductive layer, and the insulating layer. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification