Localized Plasma Processing
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Abstract
A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.
61 Citations
43 Claims
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1-6. -6. (canceled)
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7. A method of processing a work piece, comprising:
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inserting the work piece into a vacuum chamber; producing a plasma in a plasma chamber; passing a plasma jet through a reactive gas chamber; activating the reactive gas and directing the reactive gas toward a work piece to process the work piece in the vacuum chamber; and directing a focused charged particle beam toward the work piece to process the work piece without removing the work piece from the vacuum chamber. - View Dependent Claims (8, 9, 10, 11, 12, 25)
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13-24. -24. (canceled)
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26. A method of processing a work piece, comprising:
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inserting the work piece into a vacuum chamber; producing a plasma; using the plasma to activate a reactive gas; directing the reactive gas toward a work piece to process the work piece in the vacuum chamber; and directing a focused charged particle beam toward the work piece to process the work piece without removing the work piece from the vacuum chamber. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification