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MEMS SENSOR, METHOD OF MANUFACTURING THEREOF, AND ELECTRONIC APPARATUS

  • US 20110120221A1
  • Filed: 11/17/2010
  • Published: 05/26/2011
  • Est. Priority Date: 11/25/2009
  • Status: Abandoned Application
First Claim
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1. A MEMS sensor comprising:

  • a fixed portion;

    an elastically deformable portion;

    a movable weight portion coupled to the fixed portion via the elastically deformable portion, the movable weight portion including a coupling portion;

    a plurality of fixed electrode portions arranged in a first direction and protruding in a second direction perpendicular to the first direction; and

    a plurality of movable electrode portions protruding from the coupling portion in the second direction, provided to respectively face the plurality of fixed electrode portions, and arranged in the first direction, whereinthe movable weight portion comprises an additional weight portion connected to the coupling portion.

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