ULTRA-LOW REFLECTANCE BROADBAND OMNI-DIRECTIONAL ANTI-REFLECTION COATING
First Claim
1. An anti-reflection coating, wherein the anti-reflection coating has an average total reflectance of less than 10% over a spectrum of wavelengths of 400-1100 nm and a range of angles of incidence of 0-90 degrees with respect to a surface normal of the anti-reflection coating.
1 Assignment
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Accused Products
Abstract
An anti-reflection coating has an average total reflectance of less than 10%, for example less than 5.9% such as from 4.9% to 5.9%, over a spectrum of wavelengths of 400-1100 nm and a range of angles of incidence of 0-90 degrees with respect to a surface normal of the anti-reflection coating. An anti-reflection coating has a total reflectance of less than 10%, for example less than 6% such as less than 4%, over an entire spectrum of wavelengths of 400-1600 nm and an entire range of angles of incidence of 0-70 degrees with respect to a surface normal of the anti-reflection coating.
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Citations
89 Claims
- 1. An anti-reflection coating, wherein the anti-reflection coating has an average total reflectance of less than 10% over a spectrum of wavelengths of 400-1100 nm and a range of angles of incidence of 0-90 degrees with respect to a surface normal of the anti-reflection coating.
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19. (canceled)
- 20. An anti-reflection coating, wherein the anti-reflection coating has a total reflectance of less than 10% over an entire spectrum of wavelengths of 400-1600 nm and an entire range of angles of incidence of 0-70 degrees with respect to a surface normal of the anti-reflection coating.
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22-39. -39. (canceled)
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40. An anti-reflection coating, comprising:
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one or more titanium oxide layers; one or more intermixed layers located over the one or more titanium oxide layers; and one or more slanted nanorod layers, the one or more slanted nanorod layers being located over the one or more intermixed layers.
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41-54. -54. (canceled)
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55. An anti-reflection coating located over a substrate, the anti-reflection coating comprising:
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one or more non-porous layers; a first slanted nanorod layer having a first porosity located over the non-porous layer; and a second slanted nanorod layer having a second porosity located over the first slanted nanorod layer. - View Dependent Claims (56, 57, 58, 59, 60, 61, 64)
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62-63. -63. (canceled)
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65. (canceled)
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66. An anti-reflection coating, comprising:
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a first slanted nanorod layer having a first porosity; and a second slanted nanorod layer having a second porosity located over the first slanted nanorod layer; wherein the index of refraction profile of the anti-reflection coating has an approximate Gaussian distribution.
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67-76. -76. (canceled)
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77. A method of making an anti-reflection coating, comprising:
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depositing one or more titanium oxide layers; depositing one or more co-sputtered layers of titanium oxide and silicon oxide over the one or more titanium oxide layers; and depositing one or more slanted nanorod layers over the one or more co-sputtered layers titanium oxide and silicon oxide. - View Dependent Claims (78, 80, 81, 82, 83, 84, 86, 88, 89)
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79. (canceled)
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85. (canceled)
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87. (canceled)
Specification