ENVIRONMENTAL GAS SENSOR AND METHOD OF MANUFACTURING THE SAME
First Claim
Patent Images
1. An environmental gas sensor, comprising:
- an insulating substrate;
metal electrodes formed on the insulating substrate; and
a sensing layer in which different kinds of nanofibers are arranged perpendicular to each other on the metal electrodes.
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Abstract
Provided are an environmental gas sensor and a method of manufacturing the same. The environmental gas sensor includes an insulating substrate, metal electrodes formed on the insulating substrate, and a sensing layer in which different kinds of nanofibers are arranged perpendicular to each other on the metal electrodes. Thus, the environmental gas sensor can simultaneously sense two kinds of gases.
31 Citations
15 Claims
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1. An environmental gas sensor, comprising:
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an insulating substrate; metal electrodes formed on the insulating substrate; and a sensing layer in which different kinds of nanofibers are arranged perpendicular to each other on the metal electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing an environmental gas sensor, comprising:
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forming metal electrodes on an insulating substrate; arranging different kinds of nanofibers perpendicular to each other on the metal electrodes through electrospinning; and forming a sensing layer by heat-treating the different kinds of nanofibers arranged. - View Dependent Claims (12, 13, 14, 15)
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Specification