Gas-sensitive semiconductor device
First Claim
1. A gas-sensitive semiconductor device having a semiconductive channel which is delimited by a first and a second channel electrode, and having a gate electrode which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel occurs as a response to an action of a gas, wherein at least one of the gate electrode and a gate insulation layer which insulates the gate electrode from the channel has two surface sections which differ in their sensitivity to gases.
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Abstract
A gas-sensitive semiconductor device having a semiconductive channel (10) which is delimited by a first (12) and a second (14) channel electrode, and having a gate electrode (16) which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel (10) occurs as a response to an action of a gas. The gate electrode (16) and/or a gate insulation layer (20) which insulates the gate electrode from the channel, and/or a gate stack layer (18) which may be provided between the gate electrode and the channel have/has two surface sections (22, 24) which differ in their sensitivity to gases.
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20 Claims
- 1. A gas-sensitive semiconductor device having a semiconductive channel which is delimited by a first and a second channel electrode, and having a gate electrode which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel occurs as a response to an action of a gas, wherein at least one of the gate electrode and a gate insulation layer which insulates the gate electrode from the channel has two surface sections which differ in their sensitivity to gases.
Specification