ELECTROSTATIC DISCHARGE PROTECTION DEVICE FOR HIGH VOLTAGE OPERATION
First Claim
1. An electrostatic discharge (ESD) protection device, comprising:
- a high voltage P well formed in a semiconductor substrate;
an N-drift region formed in the high voltage P well;
an anode N+ diffusion region and an anode P+ diffusion region formed in the N-drift region;
a buffer N+ diffusion region formed in the N-drift region and separated a predetermined distant from the anode N+ diffusion region;
a buffer N-ballistic region surrounding the buffer N+ diffusion region;
an anode N-ballistic region surrounding the anode N+ diffusion region and the anode P+ diffusion region;
a cathode N+ diffusion region and a cathode P+ diffusion region formed in the high voltage P well and separated a predetermined distance from the N-drift region;
a MOSFET gate disposed on the semiconductor substrate between the cathode N+ diffusion region and the N-drift region; and
a capacitor electrode disposed on the semiconductor substrate between the anode N+ diffusion region and the buffer N+ diffusion region.
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Accused Products
Abstract
The present disclosure provides ESD protection devices that can effectively cope with electrostatic stress of microchips for high voltage operation. The ESD protection device includes protection device includes: a high voltage P well formed in a semiconductor substrate, an N-drift region formed in the high voltage P well, an anode N+ diffusion region and an anode P+ diffusion region formed in the N-drift region, a buffer N+ diffusion region formed in the N-drift region and separated a predetermined distant from the anode N+ diffusion region, a buffer N-ballistic region surrounding the buffer N+ diffusion region, an anode N-ballistic region surrounding the anode N+ diffusion region and the anode P+ diffusion region, a cathode N+ diffusion region and a cathode P+ diffusion region formed in the high voltage P well and separated a predetermined distance from the N-drift region, a MOSFET gate disposed on the semiconductor substrate between the cathode N+ diffusion region and the N-drift region, and a capacitor electrode disposed on the semiconductor substrate between the anode N+ diffusion region and the buffer N+ diffusion region.
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Citations
16 Claims
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1. An electrostatic discharge (ESD) protection device, comprising:
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a high voltage P well formed in a semiconductor substrate; an N-drift region formed in the high voltage P well; an anode N+ diffusion region and an anode P+ diffusion region formed in the N-drift region; a buffer N+ diffusion region formed in the N-drift region and separated a predetermined distant from the anode N+ diffusion region; a buffer N-ballistic region surrounding the buffer N+ diffusion region; an anode N-ballistic region surrounding the anode N+ diffusion region and the anode P+ diffusion region; a cathode N+ diffusion region and a cathode P+ diffusion region formed in the high voltage P well and separated a predetermined distance from the N-drift region; a MOSFET gate disposed on the semiconductor substrate between the cathode N+ diffusion region and the N-drift region; and a capacitor electrode disposed on the semiconductor substrate between the anode N+ diffusion region and the buffer N+ diffusion region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An electrostatic discharge (ESD) protection device comprising:
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an N-drift region formed in a semiconductor substrate; an anode N+ diffusion region and an anode P+ diffusion region formed in the N-drift region; a buffer N+ diffusion region formed in the N-drift region and separated a predetermined distant from the anode N+ diffusion region; a buffer N-ballistic region surrounding the buffer N+ diffusion region; an anode N-ballistic region surrounding the anode N+ diffusion region and the anode P+ diffusion region; a cathode N+ diffusion region and a cathode P+ diffusion region formed in the semiconductor substrate outside the N-drift region and separated a predetermined distance from the N-drift region; a high voltage P well surrounding the cathode N+ diffusion region and the cathode P+ diffusion region with one side of the high voltage P well disposed between the anode N-ballistic region and the buffer N-ballistic region; a MOSFET gate disposed on the semiconductor substrate between the cathode N+ diffusion region and the N-drift region; and a capacitor electrode disposed on the semiconductor substrate between the anode N+ diffusion region and the buffer N+ diffusion region. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification