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PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE METHOD OF MANUFACTURE

  • US 20110121412A1
  • Filed: 01/31/2011
  • Published: 05/26/2011
  • Est. Priority Date: 03/09/2007
  • Status: Active Grant
First Claim
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1. A microshell comprising:

  • a perforated pre-sealing layer to partially enclose a chamber on a substrate,wherein the pre-sealing layer further comprises an integrated getter layer disposed between other layers of the perforated pre-sealing layer; and

    a sealing layer on the pre-sealing layer to close the perforation.

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