SEMICONDUCTOR STRUCTURE HAIVNG A METAL GATE AND METHOD OF FORMING THE SAME
First Claim
1. A method of forming a semiconductor structure having a metal gate, the method comprising the following steps:
- providing a semiconductor substrate;
forming at least a gate structure on the semiconductor substrate, the gate structure comprising a gate dielectric layer and a gate sacrificial layer;
forming a spacer structure on a peripheral side wall of the gate structure;
forming an interlayer dielectric layer covering the gate structure and the spacer structure;
planarizing the interlayer dielectric layer to expose the gate sacrificial layer;
removing a portion of the gate sacrificial layer to an initial etching depth to form an opening and expose a portion of the spacer structure;
removing a portion of the spacer structure exposed to the opening to broaden the opening;
removing the gate sacrificial layer completely; and
forming a gate conductive layer to fill the opening.
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Accused Products
Abstract
A method of forming a semiconductor structure having a metal gate. Firstly, a semiconductor substrate is provided. Subsequently, at least a gate structure is formed on the semiconductor substrate. Afterwards, a spacer structure is formed to surround the gate structure. Then, an interlayer dielectric is formed. Afterwards, a planarization process is performed for the interlayer dielectric. Then, a portion of the sacrificial layer is removed to form an initial etching depth, such that an opening is formed to expose a portion of the spacer structure. The portion of the spacer structure exposed to the opening is removed so as to broaden the opening. Afterwards, remove the sacrificial layer completely via the opening. Finally, a gate conductive layer is formed to fill the opening.
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Citations
24 Claims
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1. A method of forming a semiconductor structure having a metal gate, the method comprising the following steps:
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providing a semiconductor substrate; forming at least a gate structure on the semiconductor substrate, the gate structure comprising a gate dielectric layer and a gate sacrificial layer; forming a spacer structure on a peripheral side wall of the gate structure; forming an interlayer dielectric layer covering the gate structure and the spacer structure; planarizing the interlayer dielectric layer to expose the gate sacrificial layer; removing a portion of the gate sacrificial layer to an initial etching depth to form an opening and expose a portion of the spacer structure; removing a portion of the spacer structure exposed to the opening to broaden the opening; removing the gate sacrificial layer completely; and forming a gate conductive layer to fill the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A semiconductor structure having a metal gate, the semiconductor structure comprising at least:
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a semiconductor substrate; a gate structure disposed on the semiconductor substrate, the semiconductor structure comprising at least a gate dielectric layer and a gate conductive layer, wherein the gate conductive layer comprises a first metal portion and a second metal portion, and the second metal portion covers the first metal portion; a first spacer disposed on the peripheral side wall of the first metal portion, and the second metal portion covering the top of the first spacer; and a second spacer disposed on the peripheral side wall of the first spacer. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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Specification