SENSING ENVIRONMENTAL PARAMETER THROUGH STRESS INDUCED IN IC

• US 20110127627A1
• Filed: 07/30/2009
• Published: 06/02/2011
• Est. Priority Date: 08/01/2008
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Pijnenbrug, Remco Henricus Wilhelmus, Ponomarev, Youri Victorovitch, Hoofman, Romano
• Granted Patent: US 8,872,290 B2
• Time in Patent Office: Days
• US Class Current: 257/431
• CPC Class Codes: G01D 5/183 Sensing rotation or linear movement using strain, force or pressure sensors

Abstract

A sensor is provided for sensing a value of a physical parameter characteristic of the sensor'"'"'s environment. The sensor is implemented in semiconductor technology. A behavior of the sensor'"'"'s electronic circuitry is affected by stress. The stress is induced by a film covering the circuitry or only part thereof. The stress is caused by the film'"'"'s material, whose dimensions depend on a value of the parameter. This dependence is different from the 5 dependence of the circuitry'"'"'s substrate on the same parameter.

Claims

1. A device comprising a sensor for sensing a value of a physical parameter indicative of an environment of the sensor, wherein:

the sensor comprises an integrated electronic circuit that includes a functional component;

the sensor comprises means for affecting a magnitude of a stress in a material of the circuit in dependence on the value of the physical parameter;

the means comprises a layer structurally coupled with the circuit and having a first coefficient of expansion with a first dependence on the physical parameter;

a second coefficient of expansion of the material has a second dependence on the physical parameter;

the first dependence is different from the second dependence;

the stress determines an electrical property of the functional component; and

the electronic circuit is operative to generate an output signal representative of the electrical property.

2. The device of claim 1, wherein the functional component is covered by the layer.

3. The device of claim 2, wherein the electronic circuit is substantially covered by the layer.

4. The device of claim 1, wherein the physical parameter is one of:

a temperature;

acidity;

a characteristic of incident light;

humidity; and

a concentration of a chemical substance.

5. The device of claim 1, accommodated in a transponder.

6. The device of claim 3, wherein the transponder comprises an RFID tag.

7. The device of claim 1, comprising further electronic circuitry wherein:

the sensor is configured for supplying a signal to the further electronic circuitry in dependence on the value sensed.

8. The device of claim 7, wherein the further circuitry is configured for processing the signal from the sensor.

9. The device of claim 8, wherein the processing comprises controlling operation of the further electronic circuitry in dependence on the value sensed.