METHOD AND APPARATUS FOR SCRIBING A LINE IN A THIN FILM USING A SERIES OF LASER PULSES

• US 20110129958A1
• Filed: 11/24/2010
• Published: 06/02/2011
• Est. Priority Date: 11/30/2009
• Status: Active Grant

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: ESI-Pyrophotonics Lasers, Inc. (MKS Instruments Incorporated)
• Inventors: Murison, Richard, Panarello, Tullio, Rekow, Matthew, Dunsky, Corey
• Granted Patent: US 7,998,838 B2
• Time in Patent Office: Days
• US Class Current: 438/95
• CPC Class Codes: B23K 2101/40 Semiconductor devices
• CPC Class Codes: B23K 2103/172 wherein at least one of the layers is non-metallic
• CPC Class Codes: B23K 26/03 Observing, e.g. monitoring, the workpiece
• CPC Class Codes: B23K 26/0624 using ultrashort pulses, i.e. pulses of 1ns or less
• CPC Class Codes: B23K 26/08 Devices involving relative movement between laser beam and workpiece
• CPC Class Codes: B23K 26/36 Removing material B23K26/55, B23K26/57 take precedence
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved

Abstract

A series of laser pulses in a pulse train, each pulse with a predetermined temporal power shape, scribes a line in a thin film of material on a substrate. The predetermined temporal pulse shape has a fast risetime and fast falltime and a pulse length between 10% power points of less than 10 ns. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is some overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with the predetermined pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with a conventional pulse shape.

Claims

1. A laser-based processing method of front surface scribing a pattern in a thin film structure disposed on a substrate, the method comprising:

providing a series of laser pulses, wherein each laser pulse in the series of laser pulses is characterized by a wavelength, a pulse energy, a pulse width between leading edge and trailing edge 10% power points, a predetermined laser pulse temporal power shape, and a laser spot area, wherein the pulse width is more than 1 ns and less than 10 ns, and wherein the fall time of the trailing edge between 90% to 10% power points is less than 2 ns;

directing the series of laser pulses along an optical path;

positioning the substrate having the thin film structure such that the thin film structure faces the optical path;

placing the laser spot of the first pulse at a spot position on the thin film structure;

removing at least a portion of the thin film; and

placing the laser spots of each of the following pulses in the series of pulses at spot positions along a pattern on the thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an overlap area of each spot overlaps in some amount an overlap area of each previous spot.

2. The method of claim 1 wherein the thin film includes copper indium gallium diselenide material.

3. The method of claim 2 wherein the copper indium gallium diselenide material is characterized by a bandgap energy wavelength and the laser wavelength is longer than the bandgap energy wavelength.

4. The method of claim 1 wherein an energy density of the laser pulse at the thin film material is more than 0.2 J/cm² but less than 0.7 J/cm² wherein energy density is defined as the pulse energy divided by the laser spot area.

5. The method of claim 1 wherein the overlap areas of two adjacent spots are more than 2% but less than 50% of the laser spot area.

6. The method of claim 1 wherein the predetermined laser pulse temporal power shape has a flat top.

7. The method of claim 1 where the predetermined laser pulse temporal power shape is further characterized by a leading edge risetime between 10% and 90% power points of less than 6 ns.

8. The method of claim 1 wherein the thin film includes copper indium diselenide material.

9. The method of claim 8 where the copper indium diselenide material is characterized by a bandgap energy wavelength and the laser wavelength is longer than the bandgap energy wavelength.

10. The method of claim 8 wherein the pulse energy of the laser pulse is chosen to provide an energy density at the thin film material of more than 0.2 J/cm² but less than 0.7 J/cm² wherein energy density is the pulse energy divided by the laser spot area.

11. The method of claim 8 wherein the overlap areas of two adjacent spots are more than 2% but less than 50% of the laser spot area.

12. The method of claim 8 wherein the predetermined laser pulse temporal power shape has a flat top.

13. The method of claim 8 where the predetermined laser pulse temporal power shape is further characterized by a leading edge risetime between 10% and 90% power points of less than 6 ns.

14. A laser-based processing method of front surface scribing a pattern in a thin film structure disposed on a substrate, the method comprising:

providing a series of laser pulses, wherein each laser pulse in the series of laser pulses is characterized by a wavelength, a pulse energy, a pulse width between leading edge and trailing edge 10% power points, a predetermined laser pulse temporal power shape, and a laser spot area, wherein the pulse width is more than 1 ns and less than 10 ns, and wherein the energy contained in the time period of the pulse following the trailing edge 50% power point is less than 5% of the pulse energy;

directing the series of laser pulses along an optical path;

positioning the substrate having the thin film structure such that the thin film structure faces the optical path;

placing the laser spot of the first pulse at a spot position on the thin film structure;

removing at least a portion of the thin film; and

placing the laser spots of each of the following pulses in the series of pulses at spot positions along a pattern on the thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an overlap area of each spot overlaps in some amount an overlap area of each previous spot.

15. The method of claim 14 wherein the thin film includes copper indium gallium diselenide material.

16. The method of claim 14 wherein the pattern is a line.

17. The method of claim 14 wherein the pattern is a closed loop.

18. The method of claim 14 wherein the pattern is a curve.

19. The method of claim 14 wherein the copper indium gallium diselenide material is characterized by a bandgap energy wavelength and the laser wavelength is longer than the bandgap energy wavelength.

20. The method of claim 14 wherein an energy density of the laser pulse at the thin film material is more than 0.2 J/cm² but less than 0.7 J/cm² wherein energy density is defined as the pulse energy divided by the laser spot area.

21. The method of claim 14 wherein the overlap areas of two adjacent spots are more than 2% but less than 50% of the laser spot area.

22. The method of claim 14 wherein the predetermined laser pulse temporal power shape is further characterized by a leading edge risetime between 10% and 90% power points of less than 6 ns.

23. The method of claim 14 wherein the thin film includes copper indium diselenide material.

24. The method of claim 23 wherein an energy density of the laser pulse at the thin film material is more than 0.2 J/cm² but less than 0.7 J/cm² wherein energy density is defined as the pulse energy divided by the laser spot area.

25. The method of claim 23 wherein the copper indium diselenide material is characterized by a bandgap energy wavelength and the laser wavelength is longer than the bandgap energy wavelength.

26. The method of claim 23 wherein the pulse energy of the laser pulse is chosen to provide an energy density at the thin film material of more than 0.2 J/cm² but less than 0.7 J/cm² wherein energy density is the pulse energy divided by the laser spot area.

27. The method of claim 23 where the predetermined laser pulse temporal power shape is further characterized by a leading edge risetime between 10% and 90% power points of less than 6 ns.