FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME
First Claim
Patent Images
1. An accelerometer, comprising:
- a suspension frame;
a proof mass; and
a plurality of flexures suspending the proof mass from the suspension frame and allowing the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer, each flexure exhibiting an initial spring rate along the sensitive axis of substantially zero.
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Abstract
In one embodiment, an accelerometer includes a suspension frame, a proof mass, and a plurality of flexures suspending the proof mass from the suspension frame. The flexures allow the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer. Each flexure exhibits an initial spring rate along the sensitive axis of substantially zero.
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Citations
38 Claims
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1. An accelerometer, comprising:
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a suspension frame; a proof mass; and a plurality of flexures suspending the proof mass from the suspension frame and allowing the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer, each flexure exhibiting an initial spring rate along the sensitive axis of substantially zero. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A flexural pivot, comprising:
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a flange; and a plurality of radially-spaced flexures extending from the flange, wherein the flexural pivot exhibits a torsional spring rate of substantially zero. - View Dependent Claims (19, 20, 21)
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22. A method for fabricating a proof mass assembly, the method comprising:
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epitaxially growing, on at least one side of a crystalline material, an alloy having a lattice constant greater than that of the crystalline material, thereby forming a starting wafer; and etching the starting wafer to define a suspension frame, a plurality of flexures extending therefrom, and a proof mass suspended by the flexures, each flexure being stressed by the lattice mismatch between the epitaxially grown alloy and the crystalline material such that its initial spring rate along a first axis is substantially zero. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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30. A method for fabricating a proof mass assembly, the method comprising:
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providing a wafer having an isolated silicon layer proximate at least one surface thereof; forming an oxide on at least a portion of each silicon layer; and etching the wafer to define a suspension frame, a plurality of flexures extending therefrom, and a proof mass suspended by the flexures, the silicon exerting a stress upon the oxide such that an initial spring rate along a first axis of each flexure is substantially zero. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
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Specification