Inertial Sensor
First Claim
1. An inertial sensor comprising:
- a movable unit suspended on a substrate via an elastic body; and
a plurality of detecting units including a movable electrode formed on the movable unit and a fixed electrode formed on the substrate,the inertial sensor for detecting an inertial force of acceleration based on electrostatic capacitance change of each of the plurality of detecting units, whereinthe plurality of detecting units have different sensitivities each defined by a ratio between an applied inertial force and physical quantity generated from each of the detecting units, andthe plurality of detecting units have a plurality of measurement ranges.
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Accused Products
Abstract
In order to provide an inertial sensor such as an acceleration sensor which can be downsized and in which a high SNR can be obtained as having a plurality of measurement ranges, an inertial sensor for detecting an inertial force of acceleration based on an electrostatic capacitance change of a detecting unit includes a plurality of detecting units D1 to D4 each having a different sensitivity defined by a ratio between an applied inertial force and physical quantity generated from each of the detecting units to provide the plurality of measurement ranges. Alternatively, when the inertial sensor includes N (a natural number of 2 or larger) pieces of movable units 6a to 6c, (N+1) or more types of measurement ranges are provided.
13 Citations
16 Claims
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1. An inertial sensor comprising:
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a movable unit suspended on a substrate via an elastic body; and a plurality of detecting units including a movable electrode formed on the movable unit and a fixed electrode formed on the substrate, the inertial sensor for detecting an inertial force of acceleration based on electrostatic capacitance change of each of the plurality of detecting units, wherein the plurality of detecting units have different sensitivities each defined by a ratio between an applied inertial force and physical quantity generated from each of the detecting units, and the plurality of detecting units have a plurality of measurement ranges. - View Dependent Claims (2, 3, 4)
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5. An inertial sensor comprising:
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N (a natural number of 2 or larger) pieces of movable units connected to a fixed unit on a substrate via an elastic body; a plurality of first detecting units for detecting a relative displacement of each of the N pieces of movable units with respect to the fixed unit; and at least one second detecting unit for detecting a relative displacement between the movable units, wherein the inertial sensor has (N+1) or more types of measurement ranges. - View Dependent Claims (6, 7, 8, 9)
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10. An inertial sensor comprising:
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N (a natural number of 2 or larger) pieces of movable units at least including a first movable unit connected to a fixed unit on a substrate via a first elastic body and a second movable unit connected to the first movable unit via a second elastic body; a plurality of first detecting units for detecting a relative displacement of each of the N pieces of movable units with respect to the fixed unit; and at least one second detecting unit for detecting a relative displacement between the movable units, wherein the inertial sensor has (N+1) or more types of measurement ranges. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification