HIGH-PRECISION MICRO/NANO-SCALE MACHINING SYSTEM
First Claim
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1. A high precision micro/nanoscale machining system, comprising:
- a multi-axis movement machine providing relative movement along multiple axes between a workpiece and a tool holder;
a cutting tool on a flexible cantilever held by the tool holder;
the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece; and
a feedback control system that uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
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Abstract
A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
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Citations
20 Claims
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1. A high precision micro/nanoscale machining system, comprising:
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a multi-axis movement machine providing relative movement along multiple axes between a workpiece and a tool holder; a cutting tool on a flexible cantilever held by the tool holder; the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece; and a feedback control system that uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A high precision micro/nanoscale machining system comprising:
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a single or multiple point cutting tool mounted on a flexible cantilever, the cutting tool having a geometry suitable for groove and pocket cutting; a precision displacement sensor to measure deflection of the cantilever during cutting; a multi-axis motion platform providing relative x, y, and z axis movements and rotational movements between a workpiece and the cutting tool; and a feedback control system that uses measurement of tool cantilever deflection during cutting to maintain a constant cantilever deflection and hence a constant load on the cutting tool. - View Dependent Claims (11, 12)
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13. A method of machining a workpiece comprising:
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placing the workpiece on a multi-axis movement machine that provides relative movement along multiple axes between a workpiece and a tool holder; positioning a cutting tool on a flexible cantilever held by the tool holder towards the workpiece, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece; contacting the cutting tool to the workpiece, wherein a load is provided on the cutting tool and the flexible cantilever is deflected; moving at least one of said cutting tool and said workpiece to machine the workpiece; during said moving, measuring deflection of the cantilever; and repositioning the tool holder based on said measured deflection to maintain a desired cantilever deflection and hence a desired load on the cutting tool. - View Dependent Claims (14, 15, 16, 17)
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18. A tool for microscale or nanoscale machining comprising:
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a flexible cantilever; a cutting geometry disposed at an end of said flexible cantilever, said cutting geometry comprising a well defined rake face, clearance faces, and at least one cutting edge. - View Dependent Claims (19)
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20. A high precision micro/nanoscale machining system, comprising:
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means for microscale or nanoscale cutting; flexible cantilever means for supporting said means for cutting; means for holding said flexible cantilever means; means for providing relative movement along multiple axes between a workpiece and said means for holding; said means for providing relative movement comprising means for setting an angle and distance of said means for cutting relative to the workpiece; means for measuring deflection of said flexible cantilever means; and feedback control mean for receiving said measured deflection and maintaining a desired deflection of said flexible cantilever means and hence a desired load on said means for cutting.
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Specification