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HIGH-PRECISION MICRO/NANO-SCALE MACHINING SYSTEM

  • US 20110132169A1
  • Filed: 09/08/2010
  • Published: 06/09/2011
  • Est. Priority Date: 09/08/2009
  • Status: Active Grant
First Claim
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1. A high precision micro/nanoscale machining system, comprising:

  • a multi-axis movement machine providing relative movement along multiple axes between a workpiece and a tool holder;

    a cutting tool on a flexible cantilever held by the tool holder;

    the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece; and

    a feedback control system that uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

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