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Back Contact Deposition Using Water-Doped Gas Mixtures

  • US 20110132450A1
  • Filed: 11/08/2010
  • Published: 06/09/2011
  • Est. Priority Date: 11/08/2009
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing a photovoltaic module, the method comprising:

  • depositing a semiconductor material adjacent to a substrate; and

    depositing a contact material adjacent to the semiconductor material in the presence of a feed gas comprising hydrogen, oxygen or water toward the substrate.

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