SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A manufacturing method of a semiconductor device, comprising the steps of:
- forming a first insulating layer over a substrate;
forming an oxide semiconductor layer over the first insulating layer;
forming a second insulating layer over the oxide semiconductor layer;
forming an insulating layer including hydrogen over the second insulating layer; and
after forming the insulating layer including hydrogen, performing a heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer.
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Accused Products
Abstract
A manufacturing method of a semiconductor device, which includes the steps of forming a gate electrode layer over a substrate having an insulating surface, forming a gate insulating layer over the gate electrode layer, forming an oxide semiconductor layer over the gate insulating layer, forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer, forming an insulating layer including oxygen over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer, and after formation of an insulating layer including hydrogen over the insulating layer including oxygen, performing heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer.
130 Citations
25 Claims
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1. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a first insulating layer over a substrate; forming an oxide semiconductor layer over the first insulating layer; forming a second insulating layer over the oxide semiconductor layer; forming an insulating layer including hydrogen over the second insulating layer; and after forming the insulating layer including hydrogen, performing a heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (2, 3)
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4. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a first gate electrode layer over a substrate having an insulating surface; forming a gate insulating layer over the first gate electrode layer; forming an oxide semiconductor layer over the gate insulating layer; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer; forming an insulating layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; forming an insulating layer including hydrogen over the insulating layer; and after forming the insulating layer including hydrogen, performing a heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (5, 6, 7)
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8. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a gate electrode layer over a substrate having an insulating surface; forming a gate insulating layer over the gate electrode layer; forming an oxide semiconductor layer over the gate insulating layer; forming an insulating layer functioning as a channel protective layer over part of the oxide semiconductor layer; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer and the insulating layer; forming an insulating layer including hydrogen over the insulating layer, the source electrode layer, and the drain electrode layer; and after forming the insulating layer including hydrogen, performing a heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (9, 10)
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11. A manufacturing method of a semiconductor device, comprising the steps of:
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forming an oxide semiconductor layer over a substrate having an insulating surface; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer; forming an insulating layer functioning as a gate insulating layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; forming a gate electrode layer over the insulating layer; forming an insulating layer including hydrogen over the insulating layer and the gate electrode layer; and after forming the insulating layer including hydrogen, performing a heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (12, 13)
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14. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a first gate electrode layer over a substrate having an insulating surface; forming a gate insulating layer over the first gate electrode layer; forming an oxide semiconductor layer over the gate insulating layer; after forming the oxide semiconductor layer, performing a first heat treatment so that a hydrogen concentration of the oxide semiconductor layer is reduced; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer; forming an insulating layer including oxygen over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; after forming the insulating layer including oxygen, performing a second heat treatment so that oxygen is supplied to the oxide semiconductor layer; forming an insulating layer including hydrogen over the insulating layer including oxygen; and after forming the insulating layer including hydrogen, performing a third heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (15, 16, 17)
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18. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a gate electrode layer over a substrate having an insulating surface; forming a gate insulating layer over the gate electrode layer; forming an oxide semiconductor layer over the gate insulating layer; after forming the oxide semiconductor layer, performing a first heat treatment so that a hydrogen concentration of the oxide semiconductor layer is reduced; forming an insulating layer including oxygen functioning as a channel protective layer over part of the oxide semiconductor layer; after forming the insulating layer including oxygen, performing a second heat treatment so that oxygen is supplied to the oxide semiconductor layer; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer and the insulating layer including oxygen; forming an insulating layer including hydrogen over the insulating layer including oxygen, the source electrode layer, and the drain electrode layer; and after forming the insulating layer including hydrogen, performing a third heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (19, 20)
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21. A manufacturing method of a semiconductor device, comprising the steps of:
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forming an oxide semiconductor layer over a substrate having an insulating surface; after forming the oxide semiconductor layer, performing a first heat treatment so that a hydrogen concentration of the oxide semiconductor layer is reduced; forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer; forming an insulating layer including oxygen functioning as a gate insulating layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; after forming the insulating layer including oxygen, performing a second heat treatment so that oxygen is supplied to the oxide semiconductor layer; forming a gate electrode layer over the insulating layer including oxygen; forming an insulating layer including hydrogen over the insulating layer including oxygen and the gate electrode layer; and after forming the insulating layer including hydrogen, performing a third heat treatment so that hydrogen in the insulating layer including hydrogen is supplied to at least the oxide semiconductor layer. - View Dependent Claims (22, 23)
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24. A semiconductor device comprising:
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a gate electrode layer over a substrate having an insulating surface; a gate insulating layer over the gate electrode layer; an oxide semiconductor layer over the gate insulating layer; a source electrode layer and a drain electrode layer over the oxide semiconductor layer; an insulating layer including oxygen in contact with the oxide semiconductor layer; and an insulating layer including hydrogen in contact with the insulating layer including oxygen. - View Dependent Claims (25)
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Specification