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APPARATUS FOR GENERATING PLASMA

  • US 20110133650A1
  • Filed: 11/08/2010
  • Published: 06/09/2011
  • Est. Priority Date: 12/09/2009
  • Status: Active Grant
First Claim
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1. An apparatus for generating plasma, the apparatus comprising:

  • a vacuum chamber comprising a through-hole at a center of its top; and

    a plasma source part, comprising;

    a dielectric part configured to protrude upward along a circumference of the through-hole;

    an upper electrode coupled to seal an opened top of the dielectric part, the upper electrode configured to receive a supply of a Radio Frequency (RF) power; and

    an inductive coil configured to;

    spirally extend along an outer circumference surface of the dielectric part; and

    receive a supply of the RF power,the plasma source part being configured to generate plasma within the vacuum chamber.

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