METHOD OF FABRICATING AN ORGANIC ELECTROLUMINESCENT DEVICE AND SYSTEM OF DISPLAYING IMAGES

• US 20110134045A1
• Filed: 02/15/2011
• Published: 06/09/2011
• Est. Priority Date: 10/16/2006
• Status: Abandoned Application

• Current Assignee: TPO Displays Corporation (InnoLux Corporation)
• Original Assignee: TPO Displays Corporation (InnoLux Corporation)
• Inventors: Liu, Chun-Yen, Chan, Chuan-Yi, Tseng, Chang-Ho
• Application Number:
  US13/028,194
• Publication Number:
  US 20110134045A1
• Time in Patent Office: Days
• US Class Current: 345/168
• CPC Class Codes: H01L 27/1229 with different crystal properties within a device or between different devices
• CPC Class Codes: H01L 27/1237 with a different composition, shape, layout or thickness of the gate insulator in different devices
• CPC Class Codes: H01L 27/1281 by using structural features to control crystal growth, e.g. placement of grain filters
• CPC Class Codes: H01L 27/1296 adapted to increase the uniformity of device parameters

Abstract

A method for fabricating organic electroluminescent devices is disclosed. The method comprises providing a substrate divided into first and second regions, forming an amorphous silicon layer on the substrate, forming a protection film on the amorphous silicon layer within the second region, performing an excimer laser annealing process on the amorphous silicon layer for converting it to a polysilicon layer, removing the protection film, patterning the polysilicon layer, thus a first patterned polysilicon layer in the first region and a second patterned polysilicon layer in the second region are formed. A resultant organic electroluminescent device is obtained. Specifically, the grain size of the first patterned polysilicon layer is large than that of the second patterned polysilicon layer.

Claims

1-20. -20. (canceled)

21. A method for fabricating organic electroluminescent devices, comprising:

providing a substrate comprising a plurality of pixels, wherein each pixel is divided into first and second regions;

forming on the substrate an amorphous silicon layer having a first section in the first region and a second section in the second region, and a protection film in the second region, wherein the second section of the amorphous silicon layer and the protection film are in a vertical stack, the protection film is between the substrate and the second section of the amorphous silicon layer and the first section of the amorphous silicon layer is not stacked with the protection film; and

annealing the first and second sections of the amorphous silicon layer by exposure to an excimer laser, to convert into first and second sections of a polysilicon layer in the first and second regions, respectively, wherein grain size of the first section of the polysilicon layer is larger than that of the second section of the polysilicon layer, as affected by the presence of the protection film in the vertical stack with the second section of the polysilicon layer.

22. The method as in claim 21, wherein the second section of the amorphous silicon layer is exposed to the excimer laser without blockage by the protection film.

23. The method as in claim 22, wherein the protection film comprises metal materials.

24. The method as in claim 22, wherein the protection film comprises a material that dissipates heat from the second section of the amorphous silicon layer as compared to the first section of the amorphous silicon layer without the protection film.

25. The method as in claim 21, wherein the second section of the amorphous silicon layer is exposed to the excimer laser through the protection film.

26. The method as in claim 25, wherein the protection film reflects a portion of the excimer laser.

27. The method as in claim 25, wherein the protection film comprises Si-based materials.

28. The method as in claim 21, further comprising patterning the amorphous silicon layer to form the first and second sections of the polysilicon layer after annealing.

29. The method as in claim 21, wherein the protection film is an adjacent layer to the second section of the amorphous silicon layer in the vertical stack.

30. The method as in claim 21, further comprising forming a gate insulating layer overlying the first and second sections of the polysilicon layer.

31. The method as in claim 21, wherein the first section of the polysilicon layer in the first region is a first active layer of a switching TFT, and the second section of the polysilicon layer in the second region is a second active layer of a driving TFT.

32. An organic electroluminescent device, comprising:

a substrate comprising a plurality of pixels, wherein each pixel is divided into first and second regions; and

a first section of a polysilicon layer in the first region and a second section of the polysilicon in the second region, wherein the grain size of the first section of the polysilicon layer is larger than that of the second section of the polysilicon layer, and wherein the first and second sections of the polysilicon layer are formed by;

forming on the substrate an amorphous silicon layer having a first section in the first region and a second section in the second region, and a protection film in the second region, wherein the second section of the amorphous silicon layer and the protection film are in a vertical stack and the protection film is between the substrate and the second section of the amorphous silicon layer; and

annealing the first and second sections of the amorphous silicon layer by exposure to an excimer laser, to convert into the first and second sections of a polysilicon layer in the first and second regions, respectively, wherein the grain size of the first section of the polysilicon layer is larger than that of the second section of the polysilicon layer as influenced by the protection film.

33. A display panel, comprising the organic electroluminescent device as claimed in claim 32.

34. An electronic device, comprising:

the display panel as claimed in claim 33; and

an input unit coupled to the display panel and operative to provide input to the display panel such that the display panel displays images.