RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
First Claim
1. A radiation source configured to generate radiation, comprising:
- a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel;
a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode; and
a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area, the fuel release area being spaced-apart from the first electrode and from the second electrode, wherein the first electrode and the second electrode form anodes and the fuel supply is an electrical discharge cathode, or wherein the first electrode and the second electrode form cathodes and the fuel supply is an electrical discharge anode.
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Accused Products
Abstract
A radiation source is configured to generate radiation. The radiation source includes a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel. The radiation source also includes a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode, and a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area. The fuel release area is spaced-apart from the first electrode and from the second electrode.
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Citations
32 Claims
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1. A radiation source configured to generate radiation, comprising:
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a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel; a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode; and a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area, the fuel release area being spaced-apart from the first electrode and from the second electrode, wherein the first electrode and the second electrode form anodes and the fuel supply is an electrical discharge cathode, or wherein the first electrode and the second electrode form cathodes and the fuel supply is an electrical discharge anode. - View Dependent Claims (2, 3, 4, 5, 6, 10, 11, 12)
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7-9. -9. (canceled)
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13-19. -19. (canceled)
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20. A method to generate radiation, comprising:
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providing a first electrode and a second electrode; transporting fuel to a fuel release area that is spaced-apart from the first electrode and the second electrode with a fuel supply; inducing release of the fuel from the fuel release area towards an electrical discharge path associated with the first electrode and the second electrode; and generating an electrical discharge to generate radiation-emitting plasma from fuel that has been released from the fuel release area, wherein the fuel supply is a third electrode, wherein electrical discharges are evoked between each of the first and second electrode on one hand and the third electrode on the other hand. - View Dependent Claims (22, 23, 24, 25, 26)
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21. (canceled)
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27-30. -30. (canceled)
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31. A lithographic apparatus comprising:
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a radiation source configured to generate radiation, the radiation source comprising a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel, a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode, and a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area, the fuel release area being spaced-apart from the first electrode and from the second electrode, wherein the first electrode and the second electrode form anodes and the fuel supply is an electrical discharge cathode, or wherein the first electrode and the second electrode form cathodes and the fuel supply is an electrical discharge anode; a patterning device configured to pattern the radiation; and a projection system configured to project the patterned radiation onto a target portion of a substrate.
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32. (canceled)
Specification