SPECTRAL PURITY FILTER FOR MULTI-LAYER MIRROR, LITHOGRAPHIC APPARATUS INCLUDING SUCH MULTI-LAYER MIRROR, METHOD FOR ENLARGING THE RATIO OF DESIRED RADIATION AND UNDESIRED RADIATION, AND DEVICE MANUFACTURING METHOD
First Claim
1. A lithographic apparatus comprising:
- a support configured to support a patterning device;
a substrate table configured to hold a substrate;
a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and
a first multi-layer mirror and a second multi-layer mirror,the first multi-layer mirror and the second multi-layer mirror being arranged along a path of the radiation beam,the first multi-layer mirror and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, andthe first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer mirror configured to reduce radiation having wavelengths in t second wavelength range different from the first wavelength range,wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.
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Accused Products
Abstract
A lithographic apparatus comprising a support configured to support a patterning device; a substrate table configured to hold a substrate; a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer minor being arranged along a path of the radiation beam, the first multi-layer minor and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer minor configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.
17 Citations
20 Claims
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1. A lithographic apparatus comprising:
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a support configured to support a patterning device; a substrate table configured to hold a substrate; a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer mirror being arranged along a path of the radiation beam, the first multi-layer mirror and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer mirror configured to reduce radiation having wavelengths in t second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for enlarging a ratio of radiation having a wavelength selected from a wavelength range of 5-20 nm to radiation having a wavelength selected from a wavelength range of 100-400 nm in a beam of radiation of a source emitting radiation in both wavelength ranges, the method comprising consecutively reflecting at least part of the beam of radiation on a first multi-layer mirror and a second multi-layer mirror,
the first multi-layer minor and the second multi-layer minor each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer minor configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer mirror configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.
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20. A device manufacturing method, comprising:
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patterning a beam of radiation; projecting the patterned beam of radiation onto a target portion of a substrate; enlarging the ratio of radiation having a wavelength selected from a wavelength range of 5-20 nm and radiation having a wavelength selected from a wavelength range of 100-400 nm by consecutively reflecting at least part of the beam of radiation on a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer mirror configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.
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Specification