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Techniques to Enhance Selectivity of Electrical Breakdown of Carbon Nanotubes

  • US 20110136304A1
  • Filed: 06/11/2010
  • Published: 06/09/2011
  • Est. Priority Date: 06/11/2009
  • Status: Abandoned Application
First Claim
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1. A method comprising:

  • providing a substrate;

    forming on a surface of the substrate a mixture of semiconducting and metallic carbon nanotubes;

    on the mixture, patterning a first slot and second slot, each having a width W and a spacing S between the first and second slot, wherein W is less than S;

    etching the mixture in the slots;

    removing the patterning;

    forming drain and source electrodes contacting ends of the mixture; and

    biasing the drain and source electrode with voltage to remove the metallic carbon nanotubes.

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