MICRO ELECTRO MECHANICAL SYSTEM
First Claim
1. A micro electro mechanical system having, formed on a first semiconductor chip,(a) a first fixed portion,(b) an elastically deformable first beam, one end of which is connected to the first fixed portion,(c) a second fixed portion,(d) an elastically deformable second beam, one end of which is connected to the second fixed portion, and(e) a displaceable movable body connected to the other end of the first beam and the other end of the second beam,wherein, when the first fixed portion and the second fixed portion are displaced in the same direction by a stress occurring in the first semiconductor chip, a spring constant of the first beam is increased as compared with that when the first fixed portion is not displaced, and a spring constant of the second beam is decreased as compared with that when the second fixed portion is not displaced.
1 Assignment
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Accused Products
Abstract
In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.
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Citations
18 Claims
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1. A micro electro mechanical system having, formed on a first semiconductor chip,
(a) a first fixed portion, (b) an elastically deformable first beam, one end of which is connected to the first fixed portion, (c) a second fixed portion, (d) an elastically deformable second beam, one end of which is connected to the second fixed portion, and (e) a displaceable movable body connected to the other end of the first beam and the other end of the second beam, wherein, when the first fixed portion and the second fixed portion are displaced in the same direction by a stress occurring in the first semiconductor chip, a spring constant of the first beam is increased as compared with that when the first fixed portion is not displaced, and a spring constant of the second beam is decreased as compared with that when the second fixed portion is not displaced.
Specification