SELF-EXCITING, SELF-SENSING PIEZOELECTRIC CANTILEVER SENSOR

• US 20110138916A1
• Filed: 02/25/2011
• Published: 06/16/2011
• Est. Priority Date: 01/23/2006
• Status: Active Grant

• Current Assignee: Drexel University
• Original Assignee: Drexel University
• Inventors: Mutharasan, Rajakkannu, Campbell, Gossett Augustus, Rijal, Kishan, Maraldo, David
• Granted Patent: US 8,511,163 B2
• Time in Patent Office: Days
• US Class Current: 73/579
• CPC Class Codes: G01H 11/08 using piezoelectric devices
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0426 Bulk waves, e.g. quartz crystal microbalance, torsional waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: H10N 30/302 Sensors

Abstract

A piezoelectric cantilever sensor includes a piezoelectric layer and a non-piezoelectric layer, a portion of which is attached to the piezoelectric layer. In one embodiment, one end of the non-piezoelectric layer extends beyond the end of piezoelectric layer to provide an overhang. The overhang piezoelectric cantilever sensor enables increased sensitivity allowing application of the device in more viscous environments, such as liquid media, as well as application in liquid media at higher flow rates than conventional piezoelectric cantilevers. In another embodiment, the sensor includes first and second bases and at least one of the piezoelectric layer and the non-piezoelectric layer is affixed to each of the first and second bases to form the piezoelectric cantilever sensor. In this embodiment, the sensor is robust and exhibits excellent sensing characteristics in both gaseous and liquid media, even when subjected to relatively high flow rates.

Claims

1. A cantilever sensor comprising:

a piezoelectric layer comprising a proximate end and a distal end;

a non-piezoelectric layer comprising a proximate end and a distal end, wherein at least a portion of the piezoelectric layer is coupled to at least a portion of the non-piezoelectric layer such that the piezoelectric layer and the non-piezoelectric layer are not coextensive;

a first base portion coupled to one of the piezoelectric layer and the non-piezoelectric layer;

a second base portion coupled to one of the piezoelectric layer and the non-piezoelectric layer; and

electrodes operatively associated with the piezoelectric layer.

2. A sensor in accordance with claim 1, wherein:

the proximate end of the non-piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion;

the proximate end of the piezoelectric layer is coupled to the first base portion; and

the distal end of the non-piezoelectric layer extends beyond the distal end of the piezoelectric layer.

3. A sensor in accordance with claim 1, wherein:

the proximate end of the non-piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion;

the distal end of the non-piezoelectric layer extends beyond the distal end of the piezoelectric layer; and

the proximate end of the non-piezoelectric layer extends beyond the proximate end of the piezoelectric layer.

4. A sensor in accordance with claim 1, wherein:

the piezoelectric layer comprises a first piezoelectric portion and a second piezoelectric portion;

the first piezoelectric portion comprises a proximate end and a distal end;

the second piezoelectric portion comprises a proximate end and a distal end;

the proximate end of the non-piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion;

the proximate end of the first piezoelectric portion is coupled to the first base portion;

the distal end of the second piezoelectric portion is coupled to the second base portion; and

the distal end of the first piezoelectric portion and the proximate end of the second piezoelectric portion form a space therebetween.

5. A sensor in accordance with claim 1, wherein:

the piezoelectric layer comprises a first piezoelectric portion and a second piezoelectric portion;

the first piezoelectric portion comprises a proximate end and a distal end;

the second piezoelectric portion comprises a proximate end and a distal end;

the proximate end of the non-piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion;

the proximate end of the first piezoelectric portion is coupled to the first base portion; and

the distal end of the first piezoelectric portion and the proximate end of the second piezoelectric portion form a space therebetween.

6. A sensor in accordance with claim 1, wherein:

the piezoelectric layer comprises a first piezoelectric portion and a second piezoelectric portion;

the first piezoelectric portion comprises a proximate end and a distal end;

the second piezoelectric portion comprises a proximate end and a distal end;

the proximate end of the non-piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion; and

the distal end of the first piezoelectric portion and the proximate end of the second piezoelectric portion form a space therebetween.

7. A sensor in accordance with claim 1, wherein:

the proximate end of the piezoelectric layer is coupled to the first base portion;

the distal end of the non-piezoelectric layer is coupled to the second base portion;

the distal end of the non-piezoelectric layer extends beyond the distal end of the piezoelectric layer; and

the proximate end of the piezoelectric layer extends beyond the proximate end of the non-piezoelectric layer.

8. A sensor in accordance with claim 1, wherein:

the proximate end of the piezoelectric layer is coupled to the first base portion;

the distal end of the piezoelectric layer is coupled to the second base portion;

the distal end of the piezoelectric layer extends beyond the distal end of the non-piezoelectric layer; and

the proximate end of the piezoelectric layer extends beyond the proximate end of the non-piezoelectric layer.

9. A sensor in accordance with claim 1, wherein the non-piezoelectric layer comprises at least one of glass, a ceramic, a metal, a polymer, and a polymer and a ceramic composite.

10. A sensor in accordance with claim 1, wherein the non-piezoelectric layer comprises at least one of silicon dioxide, copper, stainless steel, and titanium.

11. A sensor in accordance with claim 1, wherein the piezoelectric layer comprises at least one of lead zirconate titanate, lead magnesium niobate-lead titanate solid solutions, strontium lead titanate, quartz silica, piezoelectric ceramic lead zirconate and titanate (PZT), and a piezoceramic-polymer fiber composite.

12. A sensor in accordance with claim 1, wherein a length of the non-piezoelectric layer is in a range of about 0.1 mm to about 10.0 mm.

13. A sensor in accordance with claim 1, wherein a length of the piezoelectric layer is in a range of about 0.1 mm to about 10.0 mm.

14. A sensor in accordance with claim 1, wherein a width of the non-piezoelectric layer is in a range of about 0.1 mm to about 4.0 mm.

15. A sensor in accordance with claim 1, wherein a width of the piezoelectric layer is in a range of about 0.1 mm to about 4.0 mm.

16. A sensor in accordance with claim 1, wherein at least one physical dimension of at least one of the piezoelectric layer and the non-piezoelectric layer is non-uniform.

17. A sensor in accordance with claim 1, wherein the electrodes are utilized to measure a resonance frequency of the sensor.

18. A sensor in accordance with claim 17, wherein the measured resonance frequency is indicative of an amount of analyte accumulated on the sensor.

19. A sensor in accordance with claim 1, wherein:

oscillation associated stress is concentrated at a location in the piezoelectric layer; and

the electrodes are positioned proximate to the location of the concentrated stress.