ATOMIC LAYER ETCHING WITH PULSED PLASMAS
First Claim
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1. A system comprising:
- a pulsed plasma source, comprising;
a spiral coil electrode disposed around a chamber;
an inlet disposed in the tube and in fluid communication with a process gas supply; and
a reaction chamber in fluid communication with the pulsed plasma source comprising;
a substrate support; and
a boundary electrode.
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Abstract
A system and method for rapid atomic layer etching (ALET) including a pulsed plasma source, with a spiral coil electrode, a cooled Faraday shield, a counter electrode disposed at the top of the tube, a gas inlet and a reaction chamber including a substrate support and a boundary electrode. The method includes positioning an etchable substrate in a plasma etching chamber, forming a product layer on the surface of the substrate, removing a portion of the product layer by pulsing a plasma source, then repeating the steps of forming a product layer and removing a portion of the product layer to form an etched substrate.
585 Citations
23 Claims
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1. A system comprising:
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a pulsed plasma source, comprising; a spiral coil electrode disposed around a chamber; an inlet disposed in the tube and in fluid communication with a process gas supply; and a reaction chamber in fluid communication with the pulsed plasma source comprising; a substrate support; and a boundary electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for etching a substrate, comprising:
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introducing a feed gas into a plasma chamber, the feed gas comprising a mixture of inert gas and reactant gas; disposing the substrate in the plasma chamber; generating a plasma from the feed gas, the plasma containing reactants and ions; saturating a substrate surface with the reactants to form a product layer, the product layer comprising a monolayer of the reactant species and a first monolayer atoms of the substrate; and removing the product layer by exposing the product layer to the ions. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for processing a substrate comprising:
directing ions from plasma afterglow toward a substrate surface saturated with a first substance. - View Dependent Claims (20, 21, 22, 23)
Specification