Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light
First Claim
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1. A method for efficient generation of extreme ultraviolet radiation based on high-order harmonic generation, comprising:
- generating an infrared driver pulse from a drive laser;
passing the infrared driver pulse through a second harmonic generator with an output wavelength in a range from 400 to 700 nm; and
thenpassing the pulse through a gas medium to generate a high-order harmonic in the form of extreme ultraviolet radiation.
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Abstract
Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
29 Citations
20 Claims
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1. A method for efficient generation of extreme ultraviolet radiation based on high-order harmonic generation, comprising:
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generating an infrared driver pulse from a drive laser; passing the infrared driver pulse through a second harmonic generator with an output wavelength in a range from 400 to 700 nm; and
thenpassing the pulse through a gas medium to generate a high-order harmonic in the form of extreme ultraviolet radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An efficient high-harmonic-generation-based extreme ultraviolet radiation source driven by short wavelength light comprising:
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a laser configured to emit optical pulses along a path; a second harmonic generator positioned in the path of the optical pulses with output wavelength in a range from 400 to 700 nm; and an extreme ultraviolet radiation generator including a gas medium positioned in the path of the optical pulses on an opposite side of the second harmonic generator from the laser. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification