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Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light

  • US 20110140009A1
  • Filed: 12/13/2010
  • Published: 06/16/2011
  • Est. Priority Date: 12/14/2009
  • Status: Active Grant
First Claim
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1. A method for efficient generation of extreme ultraviolet radiation based on high-order harmonic generation, comprising:

  • generating an infrared driver pulse from a drive laser;

    passing the infrared driver pulse through a second harmonic generator with an output wavelength in a range from 400 to 700 nm; and

    thenpassing the pulse through a gas medium to generate a high-order harmonic in the form of extreme ultraviolet radiation.

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