OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND ORGANIC ELECTROLUMINESCENT DEVICE INCLUDING THE SAME
First Claim
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1. A thin film transistor comprising:
- a substrate;
a gate electrode formed on the substrate;
a gate insulating layer formed on the gate electrode and exposed portions of the substrate;
an oxide semiconductor layer formed on the gate insulating layer and comprising an HfInZnO-based oxide semiconductor, wherein the oxide semiconductor layer has a Zn concentration gradient; and
source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer.
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Abstract
A thin film transistor including: a substrate; a gate electrode formed on the substrate; a gate insulating layer formed on the gate electrode and exposed portions of the substrate; an oxide semiconductor layer formed on the gate insulating layer to correspond to the gate electrode, and comprising an HfInZnO-based oxide semiconductor, wherein the oxide semiconductor layer has a Zn concentration gradient; and source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer.
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Citations
28 Claims
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1. A thin film transistor comprising:
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a substrate; a gate electrode formed on the substrate; a gate insulating layer formed on the gate electrode and exposed portions of the substrate; an oxide semiconductor layer formed on the gate insulating layer and comprising an HfInZnO-based oxide semiconductor, wherein the oxide semiconductor layer has a Zn concentration gradient; and source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer. - View Dependent Claims (2, 3, 6, 7, 8, 9, 10)
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4. A thin film transistor comprising:
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a substrate; a gate electrode formed on the substrate; a gate insulating layer formed on the gate electrode and exposed portions of the substrate; an oxide semiconductor layer formed on the gate insulating layer comprising a first layer formed on the gate insulating layer and a second layer formed on the first layer, and comprising an HfInZnO-based oxide semiconductor, wherein the concentration of Zn is higher in the second layer than in the first layer; and source and drain regions respectively formed on both sides of the oxide semiconductor layer and the gate insulating layer. - View Dependent Claims (5, 11, 12, 13, 14)
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15. A method of manufacturing a thin film transistor, the method comprising:
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forming a gate electrode on a substrate; forming a gate insulating layer on the gate electrode and exposed portions of the substrate; forming an HfInZnO-based oxide semiconductor layer having a Zn concentration gradient on the gate insulating layer; and forming source and drain regions respectively extending on both sides of the oxide semiconductor layer and the gate insulating layer. - View Dependent Claims (16, 17, 18, 21, 22, 23, 24)
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19. A method of manufacturing a thin film transistor, the method comprising:
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forming a gate electrode on a substrate; forming a gate insulating layer on the gate electrode and exposed portions of the substrate; forming an HfInZnO-based oxide semiconductor layer comprising a first layer formed on the gate insulating layer and a second layer formed on the first layer, wherein the concentration of Zn is higher in the second layer than in the first layer; and forming source and drain regions extending on both sides of the oxide semiconductor layer and the gate insulating layer. - View Dependent Claims (20, 25, 26, 27, 28)
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Specification