TECHNIQUES FOR FORMING SHALLOW TRENCH ISOLATION
First Claim
1. A method for forming a shallow trench isolation structure, comprising:
- etching to form a trench for shallow trench isolation on a semiconductor substrate, the trench having side and bottom surfaces; and
applying a passivation layer on the surfaces of the trench to restrict free bonding electrons at those trench surfaces.
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Accused Products
Abstract
Techniques are disclosed for shallow trench isolation (STI). The techniques can be used to form STI structures on any number of semiconductor materials, including germanium (Ge), silicon germanium (SiGe), and III-V material systems. In general, an interfacial passivation layer is used as a liner between the semiconductor surface (such as diffusion) and isolation materials within the STI. The interfacial layer provides a passivation layer on trench surfaces to restrict free bonding electrons of the substrate material. In addition, this passivation layer is oxidized, thereby effectively forming a bi-layer (passivation and oxidation sub-layers) to form an electrically defect free interface. The interfacial bi-layer structure can be implemented, for example, with materials that will covalently bond with free bonding electrons of the substrate materials, and that will oxidize to provide transition to oxide material.
147 Citations
20 Claims
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1. A method for forming a shallow trench isolation structure, comprising:
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etching to form a trench for shallow trench isolation on a semiconductor substrate, the trench having side and bottom surfaces; and applying a passivation layer on the surfaces of the trench to restrict free bonding electrons at those trench surfaces. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. The method of claim 8 wherein the passivation layer is thermally stable.
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9. An integrated circuit device, comprising:
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a semiconductor substrate having one or more trenches etched therein, each trench having side and bottom surfaces; and a passivation layer on the surfaces of each trench to restrict free bonding electrons at those trench surfaces. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method for forming a shallow trench isolation structure, comprising:
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etching to form one or more trenches for shallow trench isolation on a semiconductor substrate, each trench having side and bottom surfaces; epitaxially growing a passivation layer on the surfaces of each trench to restrict free bonding electrons at those trench surfaces; and partially oxidizing the passivation layer, thereby forming a bi-layer of passivation material and oxidized passivation material. - View Dependent Claims (17, 18, 19, 20)
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Specification