Electronic Component Device and Method for Manufacturing the Same
First Claim
1. A vibratory device comprising:
- an elastic plate including a plate-like fixable portion, a plate-like vibratory portion spaced away from the fixable portion, and a connection portion connecting a first end of the fixable portion to a first end of the vibratory portion; and
a piezoelectric diaphragm disposed on a surface of the vibratory portion that is adjacent to the fixable portion,wherein, in a direction normal to the surface of the vibratory portion adjacent to the fixable portion, at least part of the piezoelectric diaphragm does not overlap the fixable portion.
1 Assignment
0 Petitions
Accused Products
Abstract
A vibratory device includes an elastic plate and a piezoelectric diaphragm. The elastic plate includes a fixable portion, a vibratory portion, and a connection portion. The fixable portion is fixed to a fixation member. The vibratory portion is spaced away from a fixable surface of the fixable portion that faces the fixation member and arranged substantially in parallel with the fixable surface. The connection portion connects a first end of the fixable portion in its planar direction and a first end of the vibratory portion in its planar direction. The piezoelectric diaphragm is disposed on a surface of the vibratory portion that is adjacent to the fixable portion. In a direction N normal to the surface of the vibratory portion adjacent to the fixable portion, at least part of the second piezoelectric diaphragm does not overlap the fixable portion.
16 Citations
11 Claims
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1. A vibratory device comprising:
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an elastic plate including a plate-like fixable portion, a plate-like vibratory portion spaced away from the fixable portion, and a connection portion connecting a first end of the fixable portion to a first end of the vibratory portion; and a piezoelectric diaphragm disposed on a surface of the vibratory portion that is adjacent to the fixable portion, wherein, in a direction normal to the surface of the vibratory portion adjacent to the fixable portion, at least part of the piezoelectric diaphragm does not overlap the fixable portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification