INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY
First Claim
1. An integrated MEMS triaxial magnetometer, comprising:
- first and second suspended masses defining a plane and configured to be flowed by respective currents in the plane in mutually transverse directions;
first and second fixed electrodes capacitively coupled to the first and second suspended masses, respectively;
mobile sensing electrodes carried by the first suspended mass; and
fixed sensing electrodes capacitively coupled to the mobile sensing electrodes, respectively,the first suspended mass being configured to be mobile transversely with respect to the plane toward or away from the first fixed electrode in presence of a magnetic field having a component in a first direction parallel to the plane and transverse to the current to be flowed in the first suspended mass;
the second suspended mass being configured to be mobile transversely with respect to the plane toward or away from the second fixed electrode in presence of a magnetic field having a component in a second direction parallel to the plane and transverse to the current to be flowed in the second suspended mass; and
the first suspended mass being configured to be mobile in a parallel direction to the plane and transverse to the current to be flowed in the first suspended mass in presence of a magnetic field having a component in a third direction perpendicular to the plane.
1 Assignment
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Accused Products
Abstract
Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
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Citations
29 Claims
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1. An integrated MEMS triaxial magnetometer, comprising:
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first and second suspended masses defining a plane and configured to be flowed by respective currents in the plane in mutually transverse directions; first and second fixed electrodes capacitively coupled to the first and second suspended masses, respectively; mobile sensing electrodes carried by the first suspended mass; and fixed sensing electrodes capacitively coupled to the mobile sensing electrodes, respectively, the first suspended mass being configured to be mobile transversely with respect to the plane toward or away from the first fixed electrode in presence of a magnetic field having a component in a first direction parallel to the plane and transverse to the current to be flowed in the first suspended mass; the second suspended mass being configured to be mobile transversely with respect to the plane toward or away from the second fixed electrode in presence of a magnetic field having a component in a second direction parallel to the plane and transverse to the current to be flowed in the second suspended mass; and the first suspended mass being configured to be mobile in a parallel direction to the plane and transverse to the current to be flowed in the first suspended mass in presence of a magnetic field having a component in a third direction perpendicular to the plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An electronic appliance, comprising:
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a control unit; a display coupled to the control unit; and a triaxial magnetometer coupled to the control unit, the magnetometer including; first and second suspended masses defining a plane and configured to be flowed by respective currents in the plane in mutually transverse directions; first and second fixed electrodes capacitively coupled to the first and second suspended masses, respectively; mobile sensing electrodes carried by the first suspended mass; and fixed sensing electrodes capacitively coupled to the mobile sensing electrodes, respectively, the first suspended mass being configured to be mobile transversely with respect to the plane toward or away from the first fixed electrode in presence of a magnetic field having a component in a first direction parallel to the plane and transverse to the current to be flowed in the first suspended mass; the second suspended mass being configured to be mobile transversely with respect to the plane toward or away from the second fixed electrode in presence of a magnetic field having a component in a second direction parallel to the plane and transverse to the current to be flowed in the second suspended mass; and the first suspended mass being configured to be mobile in a parallel direction to the plane and transverse to the current to be flowed in the first suspended mass in presence of a magnetic field having a component in a third direction perpendicular to the plane. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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24. An integrated MEMS triaxial magnetometer, comprising:
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first and second suspended masses positioned in a plane and configured to be flowed by respective currents in opposite first and second directions; third and fourth suspended masses positioned in the plane and configured to be flowed by respective currents in opposite third and fourth directions that are transverse to the first and second direction; first, second, third, and fourth fixed electrodes capacitively coupled to the first second, third and fourth suspended masses, respectively; first and second mobile sensing electrodes carried by the first and second suspended masses, respectively; and first and second fixed sensing electrodes capacitively coupled to the first and second mobile sensing electrodes, respectively, the first and second suspended masses being configured to be mobile transversely with respect to the plane toward or away from the first and second fixed electrodes in presence of a magnetic field having a component in the third direction; the third and fourth suspended masses being configured to be mobile transversely with respect to the plane toward or away from the second fixed electrode in presence of a magnetic field having a component in the first direction; and the first and second suspended masses being configured to be mobile in the plane in opposite directions and transverse to the currents to be flowed in the first and second suspended masses in presence of a magnetic field having a component in a fifth direction perpendicular to the plane. - View Dependent Claims (25, 26, 27, 28, 29)
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Specification