Miniaturized Switch Device
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Accused Products
Abstract
The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and operational characteristics. The switches can be protected by suitable packaging, and can be efficiently fabricated in groups or arrays.
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Citations
63 Claims
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1-43. -43. (canceled)
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44. A microfabricated switch, comprising:
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(1) a substrate; (2) a first layer of ferromagnetic material disposed on the substrate, the first layer comprising; (i) a first flexure, wherein the first flexure is substantially selectively flexible in a first direction that is substantially parallel to the substrate; (ii) a movable member, wherein the first element and the movable member are mechanically connected such that the movable member is selectively movable along the first direction between a first position and a second position; (iii) a first pad; and (iv) a second pad; (3) first and second terminals, mounted relative to the movable member such that when the movable member is in the first position, electrical current can flow between the first and second terminals; and (4) an electromagnet comprising a coil and a core, wherein the first layer does not comprise the core, and wherein the electromagnet is mounted relative to the first layer such that the first pad and second pad function as north and south poles of the electromagnet. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51)
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52. A switch, comprising:
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1) a substrate; 2) a first layer disposed on the substrate, the first layer comprising; (i) a movable member that is movable between first and second positions, and where the movable member is constrained to move substantially parallel to the substrate; (ii) a first fixed member; and (iii) a second fixed member, wherein the second fixed member and a second portion of the movable member collectively define a second gap; 3) first and second terminals, mounted relative to the movable member such that when the movable member is in the first position electrical current can flow between the first and second terminals; and 4) an electromagnet comprising a core surrounded by wires, wherein the first layer does not comprise the core; wherein the core is magnetically coupled with each of the first fixed member and second fixed member such that the first fixed member functions as a first pole of the electromagnet and the second fixed member functions as a second pole of the electromagnet. - View Dependent Claims (53, 54, 55, 56, 57)
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58. A microfabricated switch comprising:
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(1) a substrate; (2) a first layer of ferromagnetic material, the first layer comprising; (i) a movable member that is dimensioned and arranged to move along a direction substantially parallel with the substrate; (ii) a first terminal and second terminal, mounted relative to the movable member such that (i) when the movable member is in a first position a flow of a first electrical current between the first and second terminals is enabled and (ii) when the movable member is in a second position the flow of the first electrical current between the first and second terminals is disabled; and (iii) a first fixed member and second fixed member, the first fixed member and second fixed member each comprising ferromagnetic material; and (3) an electromagnet comprising; (i) a core comprising ferromagnetic material, wherein the core is not included in the first layer; and (ii) a winding that is dimensioned and arranged to enable the flow of a second electrical current through the winding; wherein the core, first fixed member, and second fixed member are physically coupled such that the first fixed member comprises a first pole of the electromagnet and the second fixed member comprises a second pole of the electromagnet; and wherein the position the movable member is based the flow of the second electrical current. - View Dependent Claims (59, 60, 61, 62, 63)
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Specification