INDUCTOR
First Claim
1. An inductor, comprising:
- a first to a fourth conductive pillars formed in one direction within a semiconductor substrate;
a first conductive line formed on one side of the semiconductor substrate and electrically connected to the second and third conductive pillars interiorly positioned among the first to fourth conductive pillars;
a second conductive line formed on the one side of the semiconductor substrate and electrically connected to the first and fourth conductive pillars exteriorly positioned among the first to fourth conductive pillars; and
a third conductive line formed on the other side of the semiconductor substrate and electrically connected to the first and third conductive pillars among the first to fourth conductive pillars.
2 Assignments
0 Petitions
Accused Products
Abstract
Provided is an inductor. The inductor includes a first to a fourth conductive terminals formed in one direction within a semiconductor substrate, a first conductive line formed on one side of the semiconductor substrate and electrically connected to the second and third conductive terminals interiorly positioned among the first to fourth conductive terminals, a second conductive line formed on the one side of the semiconductor substrate and electrically connected to the first and fourth conductive terminals exteriorly positioned among the first to fourth conductive terminals, and a third conductive line formed on the other side of the semiconductor substrate and electrically connected to the first and third conductive terminals among the first to fourth conductive terminals.
12 Citations
20 Claims
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1. An inductor, comprising:
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a first to a fourth conductive pillars formed in one direction within a semiconductor substrate; a first conductive line formed on one side of the semiconductor substrate and electrically connected to the second and third conductive pillars interiorly positioned among the first to fourth conductive pillars; a second conductive line formed on the one side of the semiconductor substrate and electrically connected to the first and fourth conductive pillars exteriorly positioned among the first to fourth conductive pillars; and a third conductive line formed on the other side of the semiconductor substrate and electrically connected to the first and third conductive pillars among the first to fourth conductive pillars. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An inductor, comprising:
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a plurality of conductive pillars penetrating a semiconductor substrate; and a plurality of conductive lines forming a coil structure by connecting the plurality of conductive pillars, wherein the plurality of conductive pillars comprising a first conductive line formed on one side of the semiconductor substrate electrically connecting the second and third conductive pillars among the plurality of conductive pillars; and a second conductive line formed on the one side of the semiconductor substrate electrically connecting the first and fourth conductive pillars among the plurality of conductive pillars, wherein a length of the first conductive line is different from that of the second conductive line. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification