CERAMIC SUBSTRATE MATERIAL, METHOD FOR THE PRODUCTION AND USE THEREOF, AND ANTENNA OR ANTENNA ARRAY

• US 20110140971A1
• Filed: 01/18/2011
• Published: 06/16/2011
• Est. Priority Date: 05/04/2007
• Status: Active Grant

• Current Assignee: Micro Systems Engineering GmbH (Micro Systems Schweiz GmbH)
• Original Assignee: Micro Systems Engineering GmbH (Micro Systems Schweiz GmbH)
• Inventors: Schmid, Ulrich, Schwanke, Dieter, Bittner, Achim, Harnack, Mirco
• Granted Patent: US 8,586,178 B2
• Time in Patent Office: Days
• US Class Current: 343/700.MS
• CPC Class Codes: C03C 15/00 Surface treatment of glass, not in the form of fibres or filaments, by etching etching or surface-brightening compositions, in general C09K13/00
• CPC Class Codes: C04B 2111/00844 for electronic applications
• CPC Class Codes: C04B 35/00 Shaped ceramic products characterised by their composition porous ceramic products C04B38/00; ceramic articles characterised by particular shape, see the relevant classes, e.g. linings for casting ladles, tundishes, cups or the like B22D41/02; ceramic substrates for microelectronic semi-conductors H01L23/15; Ceramics compositions containing free metal bonded to carbides, diamond, oxides, borides, nitrides, silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides or sulfides other than as macroscopic reinforcing agents C22C; shaping of ceramics B28B; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products chemical preparation of powders of inorganic compounds C01; infiltration of sintered ceramic preforms with molten metal C04B41/51
• CPC Class Codes: C04B 35/10 based on aluminium oxide
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/5353 Wet etching, e.g. with etchants dissolved in organic solvents
• CPC Class Codes: C04B 41/91 involving the removal of part of the materials of the treated articles, e.g. etching
• CPC Class Codes: H01Q 1/38 formed by a conductive layer on an insulating support patch antennas H01Q9/0407; microstrip dipole antennas H01Q9/065; microstrip slot antennas H01Q13/106; transmission line microstrip antennas H01Q13/206; manufacturing reflecting surfaces using insulating material for supporting the reflecting surface H01Q15/142
• CPC Class Codes: H05K 1/024 Dielectric details, e.g. changing the dielectric material around a transmission line
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 2201/0116 Porous, e.g. foam
• CPC Class Codes: H05K 3/002 by liquid chemical etching
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/24562 Interlaminar spaces
• CPC Class Codes: Y10T 428/249969 Of silicon-containing material [e.g., glass, etc.]
• CPC Class Codes: Y10T 428/24997 Of metal-containing material

Abstract

A method for producing a ceramic substrate material having a first layer and possibly a further layer is specified. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix and a second component made of a further crystalline ceramic material, which is provided in the matrix. An etching step is performed, mantle areas of the crystals and/or crystal agglomerates of the second component being etched selectively in the first layer to generate a cavity structure in the first layer. The present invention also relates to a corresponding ceramic substrate material, an antenna or an antenna array, and the use of the ceramic substrate material for an antenna or an antenna array.

Claims

1-8. -8. (canceled)

9. A ceramic substrate material comprising:

a. a first layer, the first layer comprising at least one first component made of a crystalline ceramic material and/or a glass material as a matrix, wherein the first layer contains a second component made of a further crystalline ceramic material, the mantle areas of crystals and/or crystal agglomerates of the second component being at least regionally etched in such a manner that a cavity structure is provided; and

b. a second layer,

wherein the first layer and second layer are formed of LTCCs (Low Temperature Cofired Ceramics).

10. The ceramic substrate material according to claim 9, wherein the cavity structure is a pore or tube structure.

11. The ceramic substrate material according to claim 9, wherein the etched cavity structure is only provided in a predetermined area of the first layer and extends up to a predetermined depth of the first layer.

12. The ceramic substrate material according to claim 11, wherein the second component contains Al₂O₃ crystallites and/or an aluminum-based crystalline compound different from Al₂O₃ and/or a crystalline compound based on aluminum oxide, wherein the second component has a total proportion of at most 40 volume-% in the matrix, and contains crystals and/or crystal agglomerates of the second component in the mantle areas.

13. The ceramic substrate material according to claim 9, wherein the area of the first layer in which the etched cavity structure is provided has a resulting dielectric constant ∈

_r between approximately 10 and 1.

14. The ceramic substrate material according to claim 9, wherein the area of the first layer in which the etched cavity structure is provided has a resulting dielectric constant ∈

_r between approximately 5 and 1.

17. An antenna or antenna array comprising a ceramic substrate material according to claim 9.

18. The antenna or antenna array according to claim 17, wherein the first layer (10) regionally has an etched cavity structure (12) and a metal plating (20) lying above said etched cavity structure (12) that extends from an area having the etched cavity structure into a second area in which no etched cavity structure is provided.

15-16. -16. (canceled)

19. A ceramic substrate material having a first layer including:

a. a matrix including a first component made of one or more of;

(1) a crystalline ceramic material, and

(2) a glass material,

b. a second component made of a crystalline ceramic material disposed within the matrix,

c. a cavity structure disposed within the matrix, the cavity structure being defined by the removal of at least some mantle areas of crystals and/or crystal agglomerates of the second component.

20. The ceramic substrate material of claim 19 wherein the cavity structure is defined by one or more of:

a. pores, and

b. elongated passageways.

21. The ceramic substrate material of claim 19 wherein the second component:

a. defines at most 40% of the volume of the matrix, and

b. includes one or more of;

(1) Al₂O₃ crystallites,

(2) an aluminum-based crystalline compound different from Al₂O₃, and

(3) a crystalline compound based on aluminum oxide.

22. The ceramic substrate material of claim 19 wherein the volume of the first layer having the cavity structure therein has a dielectric constant ∈

_r between approximately 1 and 10.

23. The ceramic substrate material of claim 19 wherein the volume of the first layer having the cavity structure therein has a dielectric constant ∈

_r between approximately 1 and 5.

24. The ceramic substrate material of claim 19:

a. further including a second layer, and

b. wherein the first and second layers are formed of LTCCs (Low Temperature Cofired Ceramics).

25. The ceramic substrate material of claim 19 further including a second layer defined by a sintered ceramic.

26. The ceramic substrate material of claim 19 further including a metallic lead thereon, wherein the ceramic substrate material is configured as an antenna.

27. The ceramic substrate material of claim 19:

a. wherein the first layer includes;

(1) a first portion having the cavity structure defined therein, and

(2) an adjacent second portion not having the cavity structure defined therein,

b. a metallic lead;

(1) situated on the first layer, and

(2) extending onto both the first portion and the second portion of the first layer.

28. A ceramic substrate material having a first layer including:

a. a matrix including a first component made of one or more of;

(1) a crystalline ceramic material, and

(2) a glass material,

b. a second component disposed within the matrix, the second component being made of a crystalline ceramic material, wherein at least portions of second component defined by grain boundaries between the second and first components are removed to define cavities within the first component of the matrix.

29. The ceramic substrate material of claim 28:

a. further including a second layer situated adjacent the first layer, and

b. wherein the first and second layers are formed of LTCCs (Low Temperature Cofired Ceramics).

30. The ceramic substrate material of claim 28 further including a metallic lead situated on the first layer, wherein the ceramic substrate material is configured as an antenna.