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MEMS FLUID PUMP WITH INTEGRATED PRESSURE SENSOR FOR DYSFUNCTION DETECTION

  • US 20110142688A1
  • Filed: 10/22/2008
  • Published: 06/16/2011
  • Est. Priority Date: 10/22/2008
  • Status: Active Grant
First Claim
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1. Pumping device including a pump (1) comprisinga pumping chamber (11) having a variable volume,an inlet (2) communicating with the pumping chamber (11) and comprising a valve,an outlet (5) communicating with the pumping chamber and comprising a valve,an actuator adapted to change the volume of the pumping chamber,a fluidic pathway comprising said inlet (2), said pumping chamber (11), said outlet (5) and a downstream line (7) situated downstream of the outlet valve,a pressure sensor (4) for measuring the pressure between the valves of said pathway,processing means for processing the received pressure data from the pressure sensor (4).

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