MEMS FLUID PUMP WITH INTEGRATED PRESSURE SENSOR FOR DYSFUNCTION DETECTION
First Claim
1. Pumping device including a pump (1) comprisinga pumping chamber (11) having a variable volume,an inlet (2) communicating with the pumping chamber (11) and comprising a valve,an outlet (5) communicating with the pumping chamber and comprising a valve,an actuator adapted to change the volume of the pumping chamber,a fluidic pathway comprising said inlet (2), said pumping chamber (11), said outlet (5) and a downstream line (7) situated downstream of the outlet valve,a pressure sensor (4) for measuring the pressure between the valves of said pathway,processing means for processing the received pressure data from the pressure sensor (4).
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Accused Products
Abstract
The invention relates to a pumping device including a pump (1) comprising—a pumping chamber (11) having a variable volume,—an inlet (2) communicating with the pumping chamber (11) and comprising a valve,—an outlet (5) communicating with the pumping chamber and comprising a valve,—an actuator adapted to change the volume of the pumping chamber,—a fluidic pathway comprising said inlet (2), said pumping chamber (11), said outlet (5) and a downstream line (7) situated downstream of the outlet valve,—a pressure sensor (4) for measuring the pressure between the valves of said pathway,—processing means for processing the received pressure data from the pressure sensor (4). The invention also covers a method for detecting a dysfunction in a pumping device as defined above.
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Citations
34 Claims
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1. Pumping device including a pump (1) comprising
a pumping chamber (11) having a variable volume, an inlet (2) communicating with the pumping chamber (11) and comprising a valve, an outlet (5) communicating with the pumping chamber and comprising a valve, an actuator adapted to change the volume of the pumping chamber, a fluidic pathway comprising said inlet (2), said pumping chamber (11), said outlet (5) and a downstream line (7) situated downstream of the outlet valve, a pressure sensor (4) for measuring the pressure between the valves of said pathway, processing means for processing the received pressure data from the pressure sensor (4).
Specification