ENERGY SAVINGS AND GLOBAL GAS EMISSIONS MONITORING

• US 20110144791A1
• Filed: 11/14/2010
• Published: 06/16/2011
• Est. Priority Date: 11/16/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: JUNG, JAY J., TRIBULA, DANA, CRAWFORD, SHAUN, CLARK, DANIEL O., CAYER, MAXIME, LOLDJ, YOUSSEF A.
• Granted Patent: US 9,075,408 B2
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: G05B 19/042 using digital processors G05B19/05 takes precedence
• CPC Class Codes: G05B 19/045 using logic state machines, consisting only of a memory or a programmable logic device containing the logic for the controlled machine and in which the state of its outputs is dependent on the state of its inputs or part of its own output states, e.g. binary decision controllers, finite state controllers
• CPC Class Codes: G05B 2219/23316 Standby, inactive, sleep or active, operation mode
• CPC Class Codes: G05B 2219/2612 Data acquisition interface

Abstract

Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO₂ equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.

Claims

1. An apparatus for providing energy usage statistics for a semiconductor manufacturing tool comprising:

a controller that;

determines a set of energy usage measurements for one or more manufacturing system sub-fabs; and

reports the set of energy usage measurements.

2. The apparatus of claim 1, wherein the controller is further configured to calculate and report an energy savings by comparing the set of energy usage measurements with a baseline set of energy usage measurements.

3. The apparatus of claim 1, wherein the energy usage measurements represent an energy consumption of the one or more manufacturing system sub-fabs in a low power configuration.

4. The apparatus of claim 1, wherein the controller is a sub-fab front end controller.

5. The apparatus of claim 1, wherein the energy usage measurements are reported for at least one of an instantaneous time, a time frame, or a lifetime of the manufacturing tool.

6. The apparatus of claim 1, further comprising a display for displaying the set of energy usage measurements.

7. The apparatus of claim 1, wherein the controller is further configured to report the set of energy usage measurements to a remote server.

8. The apparatus of claim 7, wherein the remote server provides for emissions tracking and reporting in accordance with a predetermined emissions measurement standard.

9. A system for providing energy usage statistics for a semiconductor manufacturing tool, comprising:

one or more controllers that;

determine a set of energy usage measurements for one or more manufacturing system sub-fabs; and

report the set of energy usage measurements to a remote server; and

wherein the remote server aggregates the energy usage measurements from the one or more controllers and provide an aggregated energy usage report.

10. A method for providing energy usage statistics for a semiconductor manufacturing tool, the method comprising:

determining a set of energy usage measurements for one or more manufacturing system sub-fabs coupled to a controller; and

reporting the energy usage measurements.

11. The method of claim 10, further comprising:

calculating an energy savings by comparing the set of energy usage measurements with a baseline set of energy usage measurements; and

reporting the energy savings.

12. The method of claim 10, wherein the energy usage measurements represent an energy consumption of the one or more manufacturing system sub-fabs in a low power configuration.

13. The method of claim 10, wherein the energy usage measurements are reported for at least one of an instantaneous time, a time frame, or a lifetime of the manufacturing tool.

14. The method of claim 10, further comprising displaying the set of energy usage measurements.

15. The method of claim 10, wherein the report the set of energy usage measurements is reported to a remote server.

16. The method of claim 10, wherein the reporting step further comprises reporting the set of energy usage measurements in a format consistent with a predetermined emissions measurement standard.