ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS

• US 20110146401A1
• Filed: 12/15/2010
• Published: 06/23/2011
• Est. Priority Date: 12/22/2009
• Status: Abandoned Application

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Takahashi, Kazuo, Onuma, Hiroshi, Hino, Koki, Honda, Junichi, Inaguma, Teruo, Aoto, Takanori
• Application Number:
  US12/968,700
• Publication Number:
  US 20110146401A1
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5628 Manufacturing; Trimming; Mounting; Housings

Abstract

Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.

Claims

1. An angular velocity sensor, comprising:

a first vibration element to detect a first angular velocity about an axis parallel to a first direction;

a second vibration element to detect a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generate an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction; and

a support substrate to support the first vibration element and the second vibration element.

2. The angular velocity sensor according to claim 1,

wherein the third direction is orthogonal to the first direction on a first plane to which the first direction and the second direction belong.

3. The angular velocity sensor according to claim 2,

wherein the support substrate has a first surface parallel to the first direction, on which the first vibration element and the second vibration element are mounted.

4. The angular velocity sensor according to claim 3,

wherein the first surface is on a second plane orthogonal to the first plane.

5. The angular velocity sensor according to claim 4, further comprising

a third vibration element to detect a fourth angular velocity about an axis parallel to a fourth direction orthogonal to the first plane.

6. The angular velocity sensor according to claim 5,

wherein the third vibration element is mounted on the first surface of the support substrate.

7. The angular velocity sensor according to claim 4,

wherein the support substrate include a fixation portion in the first surface, the fixation portion positioning the second vibration element on a detection axis along the second direction.

8. The angular velocity sensor according to claim 7,

wherein the fixation portion is a recessed portion formed in the first surface, and

wherein the recessed portion is used for positioning the second vibration element in an inclined state with respect to the second direction.

9. The angular velocity sensor according to claim 7,

wherein the fixation portion includes

a groove formed in the first surface, and

an auxiliary board including a connection end portion fitted into the groove, the auxiliary board supporting the second vibration element in an inclined state with respect to the second direction.

10. The angular velocity sensor according to claim 1, further comprising

a third vibration element to detect a fourth angular velocity about an axis parallel to a fourth direction orthogonal to the first plane.

11. The angular velocity sensor according to claim 1,

wherein the first direction and the second direction forms an angle in one of a range of 15 degrees or more and 45 degrees or less and a range of 135 degrees or more and 165 degrees or less.

12. The angular velocity sensor according to claim 1,

wherein the first vibration element has a first detection sensitivity, and

wherein the second vibration element has a second detection sensitivity higher than the first detection sensitivity.

13. The angular velocity sensor according to claim 1,

wherein the support substrate further includes a second surface on which a plurality of external connection terminals for surface mounting to an external substrate are formed, the second surface being opposite to the first surface.

14. The angular velocity sensor according to claim 1,

wherein each of the first vibration element and the second vibration element includes

a vibrator,

a base that is fixed to the support substrate and supports the vibrator,

a drive portion that is formed on a surface of the vibrator and vibrates the vibrator, and

a detection portion that is formed on the surface of the vibrator and detects a vibration component derived from Coriolis force acting on the vibrator.

15. The angular velocity sensor according to claim 1, further comprising

a signal processing circuit to generate an output signal corresponding to the third angular velocity about the axis parallel to the third direction orthogonal to the first direction on a first plane to which the first direction and the second direction belong, based on a signal related to the first angular velocity detected by the first vibration element and a signal related to the second angular velocity detected to the second vibration element.

16. An electronic apparatus, comprising:

a first vibration element to detect a first angular velocity about an axis parallel to a first direction;

a second vibration element to detect a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction;

a support substrate to support the first vibration element and the second vibration element; and

a signal processing circuit to generate an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction, based on a signal related to the first angular velocity detected by the first vibration element and a signal related to the second angular velocity detected by the second vibration element.