MEMS VIBRATING STRUCTURE USING A SINGLE-CRYSTAL PIEZOELECTRIC THIN-FILM LAYER HAVING DOMAIN INVERSIONS
First Claim
1. A vibrating micro-electro-mechanical circuit comprising:
- a substrate having a substrate surface;
at least one anchor on the substrate surface; and
a micro-electro-mechanical systems (MEMS) vibrating structure comprising;
a body suspended from the at least one anchor and comprising a single-crystal piezoelectric thin-film having a plurality of domains comprising a nominal domain adjacent to an inverted domain, such that the nominal domain has a first plurality of dipoles substantially oriented in a nominal orientation and the inverted domain has a second plurality of dipoles substantially oriented in an inverted orientation, wherein the inverted orientation is translated about 180 degrees from the nominal orientation;
a first conducting section residing on a first surface of the body that is about parallel to the substrate surface and comprising a first plurality of conducting fingers extending at least partially across an outer width of the MEMS vibrating structure; and
a second conducting section residing on the first surface of the body, comprising at least one conducting finger each extending both at least partially across the outer width of the MEMS vibrating structure and generally between two of the first plurality of conducting fingers;
such that the MEMS vibrating structure has dominant vibrations when a first electrical signal is applied to the first conducting section and a second electrical signal is applied to the second conducting section.
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Accused Products
Abstract
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate.
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Citations
25 Claims
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1. A vibrating micro-electro-mechanical circuit comprising:
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a substrate having a substrate surface; at least one anchor on the substrate surface; and a micro-electro-mechanical systems (MEMS) vibrating structure comprising; a body suspended from the at least one anchor and comprising a single-crystal piezoelectric thin-film having a plurality of domains comprising a nominal domain adjacent to an inverted domain, such that the nominal domain has a first plurality of dipoles substantially oriented in a nominal orientation and the inverted domain has a second plurality of dipoles substantially oriented in an inverted orientation, wherein the inverted orientation is translated about 180 degrees from the nominal orientation; a first conducting section residing on a first surface of the body that is about parallel to the substrate surface and comprising a first plurality of conducting fingers extending at least partially across an outer width of the MEMS vibrating structure; and a second conducting section residing on the first surface of the body, comprising at least one conducting finger each extending both at least partially across the outer width of the MEMS vibrating structure and generally between two of the first plurality of conducting fingers; such that the MEMS vibrating structure has dominant vibrations when a first electrical signal is applied to the first conducting section and a second electrical signal is applied to the second conducting section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method comprising:
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providing a vibrating micro-electro-mechanical circuit comprising; a substrate having a substrate surface; at least one anchor on the substrate surface; and a micro-electro-mechanical systems (MEMS) vibrating structure comprising; a body suspended from the at least one anchor and comprising a single-crystal piezoelectric thin-film having a plurality of domains comprising a nominal domain adjacent to an inverted domain, such that the nominal domain has a first plurality of dipoles substantially oriented in a nominal orientation and the inverted domain has a second plurality of dipoles substantially oriented in an inverted orientation, wherein the inverted orientation is translated about 180 degrees from the nominal orientation; a first conducting section residing on a first surface of the body that is about parallel to the substrate surface and comprising a first plurality of conducting fingers extending at least partially across an outer width of the MEMS vibrating structure; and a second conducting section residing on the first surface of the body, comprising at least one conducting finger extending both at least partially across the outer width of the MEMS vibrating structure and generally between two of the first plurality of conducting fingers; and applying a first electrical signal to the first conducting section and applying a second electrical signal to the second conducting section to produce dominant vibrations the MEMS vibrating structure. - View Dependent Claims (24, 25)
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Specification