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Method for Controlling the Position of a Movable Object, a Control System for Controlling a Positioning Device, and a Lithographic Apparatus

  • US 20110149263A1
  • Filed: 06/24/2010
  • Published: 06/23/2011
  • Est. Priority Date: 06/30/2009
  • Status: Active Grant
First Claim
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1. A control system for controlling a positioning device displaceable in a degree of freedom via at least one reluctance motor, the control system comprising:

  • at least one force sensing element, each force sensing element configured to sense an amount of force applied by a corresponding reluctance motor; and

    a controller configured to adjust the amount of force applied by the corresponding reluctance motor based on output from a corresponding force sensing element.

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