MICROWAVE INTRODUCTION MECHANISM, MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA PROCESSING APPARATUS
First Claim
Patent Images
1. A microwave introduction mechanism for introducing microwaves, outputted from a microwave output section, into a chamber and for use in a microwave plasma source for forming microwaves in the chamber, comprising:
- an antenna section including a plane antenna for radiating microwaves into the chamber;
a microwave transmitting member having a coaxial structure, connected to the plane antenna, for guiding microwaves to the plane antenna; and
an impedance adjustment section, provided in the microwave transmitting member, for performing impedance adjustment,wherein the impedance adjustment section includes a pair of slugs of dielectric material which are movable along the microwave transmitting member, andwherein the plane antenna has a plurality of arc-shaped slots for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “
λ
g/4+δ
”
(wherein λ
g represents the effective wavelength of microwaves, and δ
is a value that falls within the range 0≦
δ
≦
0.05λ
g), are drawn on a plane of the plane antenna, “
n”
(n is an integer not less than
2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “
n”
groups where the slots belonging to each group arranged in a radial direction and have the same central angle and the same angular position.
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Accused Products
Abstract
A microwave introduction mechanism (43) includes: an antenna section (45) including a plane antenna (54) for radiating microwaves into a chamber (1); a coaxial tube (50) connected to the plane antenna (54) to guide microwaves to the plane antenna (54); and a tuner section (44) provided in the coaxial tube (50) for impedance adjustment. The plane antenna (54) has a plurality of arc-shaped slots (54a) for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “λg/4+δ” (wherein λg represents the effective wavelength of microwaves, and δ is a value that falls within the range 0≦δ≦0.05λg), are drawn on a plane of the plane antenna, “n” (n is an integer not less than 2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “n” groups where the slots belonging to each group arranged in a radial direction and have the same central angle and the same angular position.
9 Citations
9 Claims
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1. A microwave introduction mechanism for introducing microwaves, outputted from a microwave output section, into a chamber and for use in a microwave plasma source for forming microwaves in the chamber, comprising:
-
an antenna section including a plane antenna for radiating microwaves into the chamber; a microwave transmitting member having a coaxial structure, connected to the plane antenna, for guiding microwaves to the plane antenna; and an impedance adjustment section, provided in the microwave transmitting member, for performing impedance adjustment, wherein the impedance adjustment section includes a pair of slugs of dielectric material which are movable along the microwave transmitting member, and wherein the plane antenna has a plurality of arc-shaped slots for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “
λ
g/4+δ
”
(wherein λ
g represents the effective wavelength of microwaves, and δ
is a value that falls within the range 0≦
δ
≦
0.05λ
g), are drawn on a plane of the plane antenna, “
n”
(n is an integer not less than
2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “
n”
groups where the slots belonging to each group arranged in a radial direction and have the same central angle and the same angular position. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microwave plasma source for introducing microwaves into a chamber to turn a gas, supplied into the chamber, into plasma, comprising a microwave generation mechanism for generating microwaves and a microwave introduction mechanism for introducing the generated microwaves into the chamber, wherein the microwave introduction mechanism includes:
-
an antenna section including a plane antenna for radiating microwaves into the chamber; a microwave transmitting member having a coaxial structure, connected to the plane antenna, for guiding microwaves from the microwave generation mechanism to the plane antenna; and an impedance adjustment section, provided in the microwave transmitting member, for performing impedance adjustment, wherein the impedance adjustment section includes a pair of slugs of dielectric material which are movable along the microwave transmitting member, and wherein the plane antenna has a plurality of arc-shaped slots for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “
λ
g/4+δ
”
(wherein λ
g represents the effective wavelength of microwaves, and δ
is a value that falls within the range 0≦
δ
≦
0.05λ
g), are drawn on a plane of the plane antenna, “
n”
(n is an integer not less than
2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “
n”
groups where the slots belonging to each group are arranged in a radial direction and have the same central angle and the same angular position.
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9. A microwave plasma processing apparatus comprising a chamber for housing the substrate, a gas supply mechanism for supplying a gas into the chamber, and a microwave plasma source for introducing microwaves into the chamber to turn the gas, supplied into the chamber, into a plasma, the microwave plasma source including a microwave generation mechanism for generating microwaves and a microwave introduction mechanism for introducing the generated microwaves into the chamber, said microwave plasma processing apparatus being configured to processing a substrate with the plasma in the chamber, wherein the microwave introduction mechanism includes:
-
an antenna section including a plane antenna for radiating microwaves into the chamber; a microwave transmitting member having a coaxial structure, connected to the plane antenna, for guiding microwaves from the microwave generation mechanism to the plane antenna; and an impedance adjustment section, provided in the microwave transmitting member, for performing impedance adjustment, wherein the impedance adjustment section includes a pair of slugs of dielectric material which are movable along the microwave transmitting member, and wherein the plane antenna has a plurality of arc-shaped slots for radiating microwaves, formed such that, assuming that a plurality of imaginary concentric circles, arranged at a spacing equal to an integral multiple of “
λ
g/4+δ
”
(wherein λ
g represents the effective wavelength of microwaves, and δ
is a value that falls within the range 0≦
δ
≦
0.05λ
g), are drawn on a plane of the plane antenna, “
n”
(n is an integer not less than
2) arc-shaped slots having the same length are evenly arranged on each imaginary circle, and the plurality of arc-shaped slots form “
n”
groups where the slots belonging to each group are arranged in a radial direction and have the same central angle and the same angular position.
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Specification
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Current AssigneeTokyo Electron Limited
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Original AssigneeTokyo Electron Limited
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InventorsIkeda, Taro
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Application NumberUS13/059,680Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current422/186CPC Class CodesH01J 37/32192 Microwave generated dischar...H01J 37/3222 AntennasH01J 37/32229 WaveguidesH01J 37/32256 Tuning meansH05H 1/46 using applied electromagnet...
