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Modular multichannel microelectrode array and methods of making same

  • US 20110154655A1
  • Filed: 01/06/2011
  • Published: 06/30/2011
  • Est. Priority Date: 10/07/2005
  • Status: Active Grant
First Claim
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1. A method of making a neuroprobe system, comprising the steps of:

  • providing a carrier;

    providing a flexible planar microelectrode array including;

    providing a substrate including a plurality of conductive interconnects disposed on the substrate and disposed between layers of dielectrics;

    forming a plurality of electrode sites on the substrate such that at least some electrode sites are in contact with a corresponding interconnect, andforming a plurality of bond pads, at least some of which are in contact with a respective interconnect;

    folding the planar microelectrode array; and

    coupling the planar microelectrode array to the carrier.

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