EVAPORATOR WITH INTERNAL RESTRICTION

• US 20110154854A1
• Filed: 12/31/2009
• Published: 06/30/2011
• Est. Priority Date: 12/31/2009
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Vitex Systems, Inc.
• Inventors: Rosenblum, Martin, Boesch, Damien
• Granted Patent: US 8,590,338 B2
• Time in Patent Office: Days
• US Class Current: 62/524
• CPC Class Codes: B01B 1/06 Preventing bumping
• CPC Class Codes: B05B 17/06 using ultrasonic or other kinds of vibrations
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: Y10S 165/911 Vaporization

Abstract

An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Claims

1. An evaporator comprising:

a vaporization chamber having a liquid inlet and a vapor outlet;

a vapor nozzle in the vapor outlet; and

a collar positioned between the vaporization chamber and the vapor nozzle, the collar increasing a pressure in the evaporation chamber while the conductance through the outlet of the nozzle is unchanged.

2. The evaporator of claim 1 wherein the collar has a cross-sectional area less than a cross-sectional area of the vapor nozzle.

3. The evaporator of claim 1 wherein the collar comprises a first portion insertable into the vapor outlet.

4. The evaporator of claim 3 wherein the collar comprises an annular ring.

5. The evaporator of claim 3 wherein the first portion further comprises an outwardly extending portion.

6. The evaporator of claim 5 wherein the first portion comprises an annular ring with an annular flange.

7. The evaporator of claim 5 wherein the outwardly extending portion comprises at least one tab.

8. The evaporator of claim 3 wherein the first portion has a cross-sectional area less than a cross-sectional area of the vapor nozzle.

9. The evaporator of claim 1 wherein the collar comprises a first portion insertable into the vapor outlet and a second portion connected to the first portion, the second portion having a cross-sectional area less than a cross-sectional area of the vapor nozzle.

10. The evaporator of claim 9 wherein the first portion has a flange, and wherein the second portion is connected to the flange.

11. The evaporator of claim 10 wherein the flange extends outward from the collar.

12. The evaporator of claim 10 wherein the flange extends inward from the collar.

13. The evaporator of claim 10 wherein the flange extends both inward and outward from the collar.

14. The evaporator of claim 9 wherein the second portion is removably connected to the first portion.

15. The evaporator of claim 9 wherein the second portion is permanently connected to the first portion.

16. The evaporator of claim 9 wherein the first portion comprises an annular ring.

17. The evaporator of claim 9 wherein the first portion comprises an annular ring with an annular flange.

18. The evaporator of claim 17 wherein the second portion comprises a second annular flange, and wherein the second annular flange is connected to the annular flange, and wherein the second annular flange has the cross-sectional area less than the cross-sectional area of the vapor nozzle.

19. The evaporator of claim 9 wherein the first portion further comprises an outwardly extending portion.

20. The evaporator of claim 18 wherein the outwardly extending portion comprises at least one tab.

21. The evaporator of claim 1 wherein the collar is removable.

22. An evaporator comprising:

a vaporization chamber having a liquid inlet and a vapor outlet, the vaporization chamber having a cross-sectional area, and the vapor outlet having a cross-sectional area less than the cross-sectional area of the vaporization chamber;

a vapor nozzle in the vapor outlet, the vapor nozzle having a cross-sectional area less than the cross-sectional area of the vapor outlet; and

a removable collar positioned between the vaporization chamber and the vapor nozzle, the collar having a cross-sectional area less than the cross-sectional area of the vapor nozzle.